Patterned hydrophobic and hydrophilic surfaces of ultra-smooth nanocrystalline diamond layers

Mertens, M.; Mohr, Markus; Brühne, Kai; Fecht, Hans‐Jörg; Łojkowski, Maciej; Święszkowski, Wojciech; Łojkowski, Witold

doi:10.1016/j.apsusc.2016.08.130

Cited by 37 publications

(22 citation statements)

References 21 publications

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“…The intensity ratio between the

peak (~531 eV) and the

peaks (~284.8 eV) of those three samples are respectively, 0.12, 0.65, and 0.52 (from left to right in Figure 8 ). This is also matching to the contact angle measurement results in Figure 9 , which indicates a transfer from a hydrophobic surface to a hydrophilic surface, after an O-RIE process on diamond film, and furthermore an enhancement of surface energy according to Young’s equation [ 30 ]. Different plasma process durations for uniform remaining UNCD film thickness were also tested on identical diamond films, leading to comparable results of contact resistances to those presented earlier.…”

Section: Resultssupporting

confidence: 86%

Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme

et al. 2021

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By using a methane and hydrogen process gas mixture in an appropriate hot-filament CVD process without further dopant, high electrical conductivity of over 100 S/cm has been achieved in nanocrystalline diamond films deposited on silicon single-crystalline substrates. Furthermore, it was found that an oxygen reactive-ion etching process (O-RIE) can improve the diamond film surface’s electron affinity, thus reducing the specific contact resistance. The reduction of the specific contact resistance by a factor of up to 16 was realized by the oxygen ion etching process, down to 6×10−6 Ωcm2 We provide a qualitative explanation for the mechanism behind the contact resistance reduction in terms of the electron affinity of the diamond surface. With the aid of XPS, AFM, and surface wetting measurements, we confirmed that a higher surface electron affinity is responsible for the lower specific contact resistance of the oxygen-terminated nanocrystalline diamond films.

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“…The intensity ratio between the

peak (~531 eV) and the

Section: Resultssupporting

confidence: 86%

Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme

et al. 2021

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“…In combination with high electrical conductivity it becomes an interesting material system for different MEMS applications in sensitive and harsh environments. 1 The nanocrystalline diamond films also shows a chemical flexible surface chemistry, 2 with chemical inert properties and biocompatibility, which is also useful for electrical applications, especially when the films were rendered electrical conducting.…”

Section: Introductionmentioning

confidence: 99%

Structural properties of highly conductive ultra-nanocrystalline diamond films grown by hot-filament CVD

et al. 2017

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In this work we show the correlation of the electrical conductivity of ultra-nanocrystalline (UNCD) diamond films grown by hot filament chemical vapor deposition (HFCVD) with their structural properties. The substrate temperature, the methane to hydrogen ratio and the pressure are the main factor influencing the growth of conductive UNCD films, which extends from electrical resistive diamond films (<10-4 S/cm) to highly conductive diamond films with a specific conductivity of 300 S/cm. High-resolution-transmission-electron-microscopy (HRTEM) and electron-energy-loss-spectroscopy (EELS) have been done on the highly conductive diamond films, to show the origin of the high electrical conductivity. The HRTEM results show random oriented diamond grains and a large amount of nano-graphite between the diamond crystals. EELS investigations are confirming these results. Raman measurements are correlated with the specific conductivity, which shows structural changes of sp2 carbons bonds as function of conductivity. Hall experiments complete the results, which lead to a model of an electron mobility based conductivity, which is influenced by the structural properties of the grain boundary regions in the ultra-nanocrystalline diamond films.

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“…After polishing with 3 µm diamond slurry the contact angles on the unpolished and polished BDDH were reduced to 78° and 55° respectively, which corresponds to the hydrogen termination being damaged and the surfaces therefore becoming more hydrophilic. Both sets of contact angles for the unpolished and polished BDDO electrodes are indicative of a hydrophilic and therefore predominantly oxygen terminated surface 19 . The contact angle for a fully oxidised diamond surface would be expected to be < 30°, although, diamond is considered to be predominantly oxygen terminated when the contact angle is between 0 and 60 1,20 .…”

Section: Electrode Activation Energy (Ev) Error (Ev)mentioning

confidence: 99%

Influence of temperature on the electrochemical window of boron doped diamond: a comparison of commercially available electrodes

McLaughlin

Corcoran

Pakpour‐Tabrizi

et al. 2020

Sci Rep

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This work compares the electrochemical windows of polished and unpolished boron doped diamond (BDD) electrodes with hydrogen and oxygen terminations at a series of temperatures up to 125 °C. The experiment was run at 5 bar pressure to avoid complications due to bubble formation. An alternative method for determining the electrochemical window is compared to the most commonly used method, which defines the window at an arbitrary current density cut-off (Jcut-off) value. This arbitrary method is heavily influenced by the mass transport of the electrolyte and cannot be used to compare electrodes across literature where different Jcut-off values have been used. A linear fit method is described which is less affected by the experimental conditions in a given measurement system. This enables a more accurate comparison of the relative electrochemical window from various diamond electrode types from reported results. Through comparison of polished and unpolished BDD electrodes, with hydrogen and oxygen surface terminations, it is determined that the electrochemical window of BDD electrodes narrows as temperature increases; activation energies are reported.

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Patterned hydrophobic and hydrophilic surfaces of ultra-smooth nanocrystalline diamond layers

Cited by 37 publications

References 21 publications

Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme

Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme

Structural properties of highly conductive ultra-nanocrystalline diamond films grown by hot-filament CVD

Influence of temperature on the electrochemical window of boron doped diamond: a comparison of commercially available electrodes

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