Abstract:The effect of pattern size on electron shading over a line-and-space photoresist pattern on a MOS capacitor was determined by a numerical simulation. It was found that it takes longer for the potential field to attain the steady state as the pattern shrinks and that the steady-state electron shading is independent of pattern size; that is, the potential field is linearly scalable. We also revealed that the gatevoltage change can be easily analyzed by a simple electric circuit model. Moreover the capacitance be… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.