A comparison is made between plasma profiling time-of-flight mass spectrometry (PP-TOFMS) and nuclear reaction analysis (NRA) for depth profiling of 18 O tracer in porous anodic oxide films on aluminum. The films were formed galvanostatically, for a range of times, using phosphoric acid electrolytes that were either enriched in 18 O or of the natural isotopic concentration. The morphologies of the films were determined by electron microscopy. The findings from PP-TOFMS and NRA reveal a partitioning of the tracer between the surface regions and buried layers of the films. However, a relatively high background of 16 O in PP-TOFMS prevents a reliable quantification of the concentration of 18 O.