Patchwork metasurface quantum well photodetectors with broadened photoresponse

Hainey, Mel; Mano, Takaaki; Kasaya, Takeshi; Jimba, Yoji; Miyazaki, Hiroshi; Ochiai, Tetsuyuki; Osato, Hirotaka; Watanabe, Kazuhiro; Sugimoto, Yoshimasa; Kawazu, Takuya; Arai, Yukinaga; Shigetou, Akitsu; Miyazaki, Hideki T.

doi:10.1364/oe.408515

Cited by 10 publications

(8 citation statements)

References 35 publications

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“…Such PMAs have advantages such as high fabrication tolerance and a performance matching that of MIM-type absorbers. The EMIM-type absorbers can be used for other types of IR sensors (e.g., quantum-type sensors 25,26 ) and other applications (e.g., polarimetric imaging [27][28][29][30][31] or multispectral detection [32][33][34] ). We expect the results presented here to contribute to the realization of advanced functional uncooled IR sensors and to expand their range of applications.…”

Section: Discussionmentioning

confidence: 99%

Multi-spectral uncooled infrared sensors fabricated using encapsulated metal-insulator-metal plasmonic metamaterial absorbers

Ogawa

Ueno²,

Yamagishi³

et al. 2023

Infrared Technology and Applications XLIX

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Multispectral uncooled infrared (IR) sensors are attracting interest for use in applications such as gas analysis, hazardous material recognition, and biological analysis. However, conventional sensors require additional filters or a resonant structure in the vertical direction. To address this challenge, we investigated plasmonic metamaterial absorbers (PMAs) such as plasmonic crystals (PCs), metal-insulator-metal (MIM), and mushroom-type PMAs. Such PMAs exhibit wavelength-selective absorption by surface plasmon resonance (SPR, and the absorption wavelength can be controlled by modifying the features of the surface pattern (e.g., the periodicity of dimples and the micropatch size). Previously, we fabricated thermopiles with PC-type PMAs and used them for wavelength-selective detection. Although PC-type PMAs have advantages such as easy fabrication, robustness against structural fluctuations, and a wide operating wavelength range, they suffer from an incidence-angle dependence and require a large absorber volume. Here, we fabricated thermopiles with encapsulated MIM (EMIM)-type PMAs using a complementary metal oxide semiconductor process. The devices consist of a top encapsulated layer, periodic top micropatches, a flat insulator layer, and a bottom reflector. The encapsulated layer functions as a protective layer. Like MIM-type PMAs, the EMIM-type PMAs exhibit incidenceangle independence and a thin absorber volume, where the top micropatch induces localized SPR with the bottom reflector, and its size mainly determines the absorption wavelength. Spectral measurements showed that wavelengthselective IR detection can be performed in the mid-IR wavelength range without any additional filters. We expect the obtained results to contribute to the realization of advanced functional uncooled IR sensors and expand their range of applications.

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Section: Discussionmentioning

confidence: 99%

Multi-spectral uncooled infrared sensors fabricated using encapsulated metal-insulator-metal plasmonic metamaterial absorbers

Ogawa

Ueno²,

Yamagishi³

et al. 2023

Infrared Technology and Applications XLIX

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show abstract

“…Figure 1b,c are the front view and top view of the device, respectively. The QWIP layer grown by molecular beam epitaxy on a GaAs substrate could be transferred to an Au substrate by wafer bonding [9]. The device is composed of two MIM structures, and the widths of the two quantum well active regions are, respectively, L 1 and L 2 (L 1 = 2.5 µm, L 2 = 5 µm).…”

Section: Methodsmentioning

confidence: 99%

“…Nanomaterials 2021, 11, x FOR PEER REVIEW 3 of 10 strate could be transferred to an Au substrate by wafer bonding [9]. The device is composed of two MIM structures, and the widths of the two quantum well active regions are, respectively, L1 and L2 (L1 = 2.5 μm, L2 = 5 μm).…”

Section: Methodsmentioning

confidence: 99%

“…The main coupling modes are edge coupling, grating coupling, random reflection coupling, and microcavity coupling [6,7]. With the continuous improvement of QWIP performance, the requirements for coupling devices are also increasing, so how to increase the photoelectric coupling efficiency is still one of the main challenges of current research [8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

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Stacked Dual-Band Quantum Well Infrared Photodetector Based on Double-Layer Gold Disk Enhanced Local Light Field

Liu

Zuo

et al. 2021

Nanomaterials

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We propose a stacked dual-band quantum well infrared photodetector (QWIP) integrated with a double-layer gold disk. Two 10-period quantum wells (QW) operating at different wavelengths are stacked together, and gold nano-disks are integrated on their respective surfaces. Numerical calculations by finite difference time domain (FDTD) showed that the best enhancement can be achieved at 13.2 and 11.0 µm. By integrating two metal disks, two plasmon microcavity structures can be formed with the substrate to excite localized surface plasmons (LSP) so that the vertically incident infrared light can be converted into electric field components perpendicular to the growth direction of the quantum well (EZ). The EZ electric field component can be enhanced up to 20 times compared to the incident light, and it is four times that of the traditional two-dimensional hole array (2DHA) grating. We calculated the enhancement factor and coupling efficiency of the device in the active region of the quantum well. The enhancement factor of the active region of the quantum well on the top layer remains above 25 at the wavelength of 13.2 μm, and the enhancement factor can reach a maximum of 45. Under this condition, the coupling efficiency of the device reaches 2800%. At the wavelength of 11.0 μm, the enhancement factor of the active region of the quantum well at the bottom is maintained above 6, and the maximum can reach about 16, and the coupling efficiency of the device reaches 800%. We also optimized the structural parameters and explored the influence of structural changes on the coupling efficiency. When the radius (r1, r2) of the two metal disks increases, the maximum coupling efficiency will be red-shifted as the wavelength increases. The double-layer gold disk structure we designed greatly enhances the infrared coupling of the two quantum well layers working at different wavelengths in the dual-band quantum well infrared photodetector. The structure we designed can be used in stacked dual-band quantum well infrared photodetectors, and the active regions of quantum wells working at two wavelengths can enhance the photoelectric coupling, and the enhancement effect is significant. Compared with the traditional optical coupling structure, the structure we proposed is simpler in process and has a more significant enhancement effect, which can meet the requirements of working in complex environments such as firefighting, night vision, and medical treatment.

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“…Fabricating etched and unetched cavities allow for systematic evaluation of noise reduction effects. Previously, etching away the QWIP layer outside of the metal-dielectric-metal (MDM) cavities has been used to reduce noise in metasurface QWIPs with identical N w [7][8][9][10][11]. Etching reduces the electrical area of metasurface QWIPs, reducing I D while minimally affecting R and ƞ abs due to the localized absorption in the MDM cavity.…”

Section: Metasurface Qwips With Other Cavity Designsmentioning

confidence: 99%

Supplementary document for Breaking the interband detectivity limit with metasurface multi-quantum-well infrared photodetectors - 5568110.pdf

Hainey,

Mano,

Kasaya

et al. 2021

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Patchwork metasurface quantum well photodetectors with broadened photoresponse

Cited by 10 publications

References 35 publications

Multi-spectral uncooled infrared sensors fabricated using encapsulated metal-insulator-metal plasmonic metamaterial absorbers

Multi-spectral uncooled infrared sensors fabricated using encapsulated metal-insulator-metal plasmonic metamaterial absorbers

Stacked Dual-Band Quantum Well Infrared Photodetector Based on Double-Layer Gold Disk Enhanced Local Light Field

Supplementary document for Breaking the interband detectivity limit with metasurface multi-quantum-well infrared photodetectors - 5568110.pdf

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