2016
DOI: 10.1088/0022-3727/49/24/245105
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Passivation of Al2O3 / TiO2on monocrystalline Si with relatively low reflectance

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Cited by 4 publications
(2 citation statements)
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“…The substrates are n-type (100) Si wafers (CZ, thickness 250-300 μm and a resistivity 10-30 Ω.cm from Sil'tronix ST) cut in 20 mm ˟ 20 mm pieces. Prior to spin coating deposition, the substrates are cleaned with conventional Radio Corporation of America procedure (RCA) [22]. The deposition process while respecting DOE approach is performed.…”
Section: Experiments Details 1 Spin Coating Of Upconversion Nanoparti...mentioning
confidence: 99%
“…The substrates are n-type (100) Si wafers (CZ, thickness 250-300 μm and a resistivity 10-30 Ω.cm from Sil'tronix ST) cut in 20 mm ˟ 20 mm pieces. Prior to spin coating deposition, the substrates are cleaned with conventional Radio Corporation of America procedure (RCA) [22]. The deposition process while respecting DOE approach is performed.…”
Section: Experiments Details 1 Spin Coating Of Upconversion Nanoparti...mentioning
confidence: 99%
“…Recently, intensive studies on high dielectric constants (high-k) materials have been carried out to look for alternative gate dielectric materials applied in the silicon channel metal-oxide-semiconductor (MOS) devices in order to replace the traditional silicon dioxide (SiO 2 ) for its limit of exponentially increasing tunneling current with decreasing dielectric thickness [1][2][3][4][5][6][7]. Unfortunately, an interface layer (IL) do exist between the Si and high-k oxides.…”
Section: Introductionmentioning
confidence: 99%