2021
DOI: 10.3390/mi13010010
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Passivated Porous Silicon Membranes and Their Application to Optical Biosensing

Abstract: A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al2O3, hafnium oxide HfO2 and titanium oxide TiO2. The fabricated membranes were characterized in terms of morphology, optical properties and chemical properties. Stability tests and optical probing noise level determination were also performed. Preliminary r… Show more

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Cited by 8 publications
(11 citation statements)
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References 35 publications
(47 reference statements)
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“…19,35,36 The successful deposition of several metal-oxide layers inside PSi membranes using ALD was already demonstrated previously. 18 In this study, the ALD deposition naturally led to a decrease in pore size and porosity. After the ALD, the stability of the PSiMs was improved.…”
Section: ■ Discussionmentioning
confidence: 79%
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“…19,35,36 The successful deposition of several metal-oxide layers inside PSi membranes using ALD was already demonstrated previously. 18 In this study, the ALD deposition naturally led to a decrease in pore size and porosity. After the ALD, the stability of the PSiMs was improved.…”
Section: ■ Discussionmentioning
confidence: 79%
“…40,41 Moreover, TiO 2 was also observed to be more hydrophilic than ALD-Al 2 O 3 , 41 which was tested as passivation in a previous study. 18 These hypotheses, while supported by the literature, however remain to be further investigated.…”
Section: ■ Discussionmentioning
confidence: 89%
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