Parylene-coated bioinspired artificial hair cell for liquid flow sensing

Qualtieri, Antonio; Rizzi, Francesco; Epifani, G.; Ernits, Andres; Kruusmaa, Maarja; Vittorio, Massimo De

doi:10.1016/j.mee.2012.07.072

Cited by 55 publications

(60 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The stress-driven artificial hair cell described by Qualtieri et al [38] was tested and calibrated in continuous water flow up to 0.5

normalm s^{- 1}

. A scanning electron microscope image of the artificial hair cell is presented in Figure 9.…”

Section: Results and Applicationsmentioning

confidence: 99%

“…The SiN/Si-based cantilever reaches approximately 1.2

normalm normalm

tip height above the base layer. A thin hydrophobic parylene layer covers and securely waterproofs the entire surface of the sensor [14,38]. Figure 10 shows the electrical behavior of the flow sensor with varying material thicknesses in a continuous water flow.…”

Section: Results and Applicationsmentioning

confidence: 99%

“…Adapted from their AlN/Mo flow sensor, Qualtieri et al [38] developed a second bulk micromachining process for a SiN/Si-based stress-driven microcantilever, as shown in Figure 4. An SOI substrate, made up of a 400

sans-serifμ normalm

silicon wafer, a 2

sans-serifμ normalm

-thick SiO

_{2}

insulation layer and a 2

sans-serifμ normalm

silicon device layer, was coated with 300

normaln normalm

SiN on the bottom and top sides.…”

Section: Methodsmentioning

confidence: 99%

See 2 more Smart Citations

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

Self Cite

View full text Add to dashboard Cite

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.

show abstract

“…The stress-driven artificial hair cell described by Qualtieri et al [38] was tested and calibrated in continuous water flow up to 0.5

normalm s^{- 1}

. A scanning electron microscope image of the artificial hair cell is presented in Figure 9.…”

Section: Results and Applicationsmentioning

confidence: 99%

“…The SiN/Si-based cantilever reaches approximately 1.2

normalm normalm

Section: Results and Applicationsmentioning

confidence: 99%

sans-serifμ normalm

silicon wafer, a 2

sans-serifμ normalm

-thick SiO

_{2}

insulation layer and a 2

sans-serifμ normalm

silicon device layer, was coated with 300

normaln normalm

SiN on the bottom and top sides.…”

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…Unfortunately, the above structures are very fragile and suffer from non-uniformity during fabrication. Qualtieri et al [54,55] introduced a waterproof system mimicking SNs that was also based on a piezo-resistive detection principle. Their self-binding cantilevers consisted of Si, SiO 2 , SiN 4 or aluminum nitride.…”

Section: Biomimetic Flow Sensors: State Of the Artmentioning

confidence: 99%

Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

et al. 2015

View full text Add to dashboard Cite

Fish sense water motions with their lateral line.The lateral line is a sensory system that contains up to several thousand mechanoreceptors, called neuromasts. Neuromasts occur freestanding on the skin and in subepidermal canals. We developed arrays of flow sensors based on lateral line canal neuromasts using a biomimetic approach. Each flow sensor was equipped with a PDMS (polydimethylsiloxane) lamella integrated into a canal system by means of thick-and thin-film technology. Our artificial lateral line system can estimate bulk flow velocity from the spatio-temporal propagation of flow fluctuations. Based on the modular sensor design, we were able to detect flow rates in an industrial application of tap water flow metering. Our sensory system withstood water pressures of up to six bar. We used finite element modeling to study the fluid flow inside the canal system and how this flow depends on canal dimensions. In a second set of experiments, we separated the flow sensors from the main stream by means of a flexible membrane. Nevertheless, these biomimetic neuromasts were still able to sense flow fluctuations. Fluid separation is a prerequisite for flow measurements in medical and pharmaceutical applications.

show abstract

“…Today, the use of parylene C is essential for many industrial applications due to the well‐controlled chemical vapor deposition (CVD) process compatible with microelectronic applications, its excellent conformal deposition in very complex geometries, its excellent (di)electric properties (low conductivity, low dielectric losses and low leakage current) and its barrier properties against various chemical agents. Furthermore, it is biocompatible and its deposit remains uniform even over large areas . Unfortunately, this polymer is strongly polar due to the CCl bonds present in its chemical structure, and the main problem with parylene C electrets is the stability of electric charges over time.…”

Section: Introductionmentioning

confidence: 99%

Annealing for the improvement of the capabilities of parylene C as electret

Kachroudi

Lagomarsini

Mareau

et al. 2018

J of Applied Polymer Sci

View full text Add to dashboard Cite

Parylene C is a polymer elaborated by chemical vapor deposition and is particularly useful for the coating of deformed structures. New‐generation soft energy harvesting electrostatic generators can be of complex shape. These generators need electret material in order for them to function. It could thus be interesting to incorporate parylene C in this device. However, this polymer suffers from bad retention of trapped charges after corona discharge and a poor thermal stability of these charges. In this work, parylene C polymers were subjected to specific annealing before corona charging. This induces strong changes in the crystallinity of the material. Atomic force microscopy and X‐ray diffraction quantified the crystalline nature of parylene C following the annealing temperature. Surface potential decay of corona‐charged parylene C demonstrated that annealing to about 150°C is beneficial for the trapping of charges for a long time (analysis over 12 days). At the same time, thermal stability of the electret parylene C is achieved up to 100°C. Spherulites with a specific area close to the surface of the polymer could explain such performances due to their influence on the distribution of traps. Dielectric analysis does not confirm that the decay of surface charges is correlated to the dynamics of polymer chains, although the moving of chains probably influences the flowing of these charges. In sum, annealed parylene C appears to be a new interesting candidate for electret‐based electrostatic generators. © 2018 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2019, 136, 46908.

show abstract

Parylene-coated bioinspired artificial hair cell for liquid flow sensing

Cited by 55 publications

References 15 publications

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts

Annealing for the improvement of the capabilities of parylene C as electret

Contact Info

Product

Resources

About