Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber

Gasonoo, Akpeko; Lee, Jeong‐Hwan; Lim, Young-Ji; Lee, Seunghun; Choi, Yoonseuk; Lee, Jae Hyun

doi:10.1007/s13391-020-00236-x

Cited by 12 publications

(9 citation statements)

References 24 publications

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“…For example, Yang et al [ 19 ] used Parylene–metal multilayers as a membrane component of ultrasonic transducers to implement a thin-film barrier isolation option in miniature devices. In general, Parylene in combination with metal layers are used as flexible [ 20 , 21 , 22 , 23 , 24 ], stretchable [ 21 ] and light transmissive [ 21 , 25 , 26 ] matrices, and as protective [ 25 , 26 , 27 ], isolating [ 28 , 29 , 30 ] and dielectric material [ 24 , 31 , 32 , 33 ] for OLED design [ 26 , 29 ], organic solar cells [ 25 ], microelectronic devices [ 20 , 22 , 24 , 28 , 31 , 33 ], prostheses [ 22 ], implants [ 34 ] and coplanar waveguides [ 32 ]. Those systems are also reported to improve the fracture resistance in dental ceramics and composite materials [ 27 ].…”

Section: Introductionmentioning

confidence: 99%

Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts

Weber

Vorobev²,

Viöl

2022

Nanomaterials

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In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1–2 nm for layer thickness and 10–30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7–6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4–8 nm for the metal layers, as well as 20–29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces.

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Section: Introductionmentioning

confidence: 99%

Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts

Weber

Vorobev²,

Viöl

2022

Nanomaterials

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“…However, its major limitation is slow growth rate; hence, it is expensive to be considered for large area commercial applications in BIPV systems. Typical growth rate of inorganic films by atomic layer deposition is below 2 Å/cycle [22], which is significantly low as compared to the high film growth rate of more than 60 nm/min that can be achieved by magnetron sputtering [23]. Unfortunately, most of the materials selected for the multilayer structures have low refractive indices [14,24,25].…”

Section: Introductionmentioning

confidence: 99%

“…We verified through computer simulation based on wave optics that metal oxide thin layers with significant difference in their refractive index could be integrated to realize different colors with good transmittance. Several reports have also investigated that commercially available nitrides and other dielectrics can be applied in passivation applications for advanced transparent flexible organic light emitting diodes and other organic electronic devices [23]. So far, most of the investigations have only focused on optical transparency of the dielectrics used in passivation applications.…”

Section: Introductionmentioning

confidence: 99%

Color Glass by Layered Nitride Films for Building Integrated Photovoltaic (BIPV) System

et al. 2021

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We investigated layered titanium nitride (TiN) and aluminum nitride (AlN) for color glasses in building integrated photovoltaic (BIPV) systems. AlN and TiN are among suitable and cost-effective optical materials to be used as thin multilayer films, owing to the significant difference in their refractive index. To fabricate the structure, we used radio frequency magnetron deposition method to achieve the target thickness uniformly. A simple, fast, and cheap fabrication method is achieved by depositing the multilayer films in a single sputtering chamber. It is demonstrated that a multilayer stack that allows light to be transmitted from a low refractive index layer to a high refractive index layer or vice-versa can effectively create various distinct color reflections for different film thicknesses and multilayer structures. It is investigated from simulation based on wave optics that TiN/AlN multilayer offers better color design freedom and a cheaper fabrication process as compared to AlN/TiN multilayer films. Blue, green, and yellow color glasses with optical transmittance of more than 80% was achieved by indium tin oxide (ITO)-coated glass/TiN/AlN multilayer films. This technology exhibits good potential in commercial BIPV system applications.

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“…In addition, the electrical strength is high, and the dielectric constant is measured to be around 3 . PPx coatings are widely used as passivation layers. − Due to these properties, PPx is a promising candidate for polymeric gate dielectric layers. However, most previous studies on PPx films as dielectric layers (not passivation layers) have focused on organic semiconductors, and only a limited number of studies on metal oxide semiconductors have been reported. − Additionally, there has been significant progress in the preparation and application of functionalizable PPx coatings over the past two decades. − Conformal and pinhole-free polymeric thin films have been prepared using the Gorham method with both commercially available and newly synthesized precursors (i.e., monomeric [2.2]paracyclophanes), meaning that one can design different types of dielectric layers using a single method.…”

Section: Introductionmentioning

confidence: 99%

Chemically Tunable Organic Dielectric Layer on an Oxide TFT: Poly(p-xylylene) Derivatives

Kim

Jang

Bae

et al. 2021

ACS Appl. Mater. Interfaces

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Inorganic materials such as SiO x and SiN x are commonly used as dielectric layers in thin-film transistors (TFTs), but recent advancements in TFT devices, such as inclusion in flexible electronics, require the development of novel types of dielectric layers. In this study, CVD-deposited poly(p-xylylene) (PPx)-based polymers were evaluated as alternative dielectric layers. CVD-deposited PPx can produce thin, conformal, and pinhole-free polymer layers on various surfaces, including oxides and metals, without interfacial defects. Three types of commercial polymers were successfully deposited on various substrates and exhibited stable dielectric properties under frequency and voltage sweeps. Additionally, TFTs with PPx as a dielectric material and an oxide semiconductor exhibited excellent device performance; a mobility as high as 22.72 cm2/(V s), which is the highest value among organic gate dielectric TFTs, to the best of our knowledge. Because of the low-temperature deposition process and its unprecedented mechanical flexibility, TFTs with CVD-deposited PPx were successfully fabricated on a flexible plastic substrate, exhibiting excellent durability over 10000 bending cycles. Finally, a custom-synthesized functionalized PPx was introduced into top-gated TFTs, demonstrating the possibility for expanding this concept to a wide range of chemistries with tunable gate dielectric layers.

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Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber

Cited by 12 publications

References 24 publications

Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts

Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts

Color Glass by Layered Nitride Films for Building Integrated Photovoltaic (BIPV) System

Chemically Tunable Organic Dielectric Layer on an Oxide TFT: Poly(p-xylylene) Derivatives

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