Particulate characteristics and deposition features of fine AIN powder synthesized by vapour-phase reaction

Kimura, Ikuo; Hotta, Noriyasu; Nukui, Hideki; Saito, Natsukaze; Yasukawa, Saburo

doi:10.1007/bf01168977

Cited by 34 publications

(6 citation statements)

References 6 publications

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“…Aluminum nitride (AlN) ceramics, because of their excellent physical and chemical properties as high thermal-conductivity, low thermal-inflate coefficient, chemical inertness, and large energy gap, have attracted considerable attention to physics, chemistry, and material science . These materials can be produced, for example, by chemical vapor deposition from aluminum salts reacting with ammonia , or from organometallic precursors . Under vacuum condition and using magnetron reactive sputtering technique, the sputtered Al atoms can react with N 2 to form a new-type AlN nanofilm, and some Al n N m precursor intermediates have been experimentally already observed .…”

Section: Introductionmentioning

confidence: 99%

Geometric and Energetic Aspects of Aluminum Nitride Cages

Zhang

et al. 2002

J. Phys. Chem. A

146

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The structure and energy of aluminum nitride cages (AlN) n (n ) 2-41) have been investigated theoretically. The most stable cages have been constructed on the basis of a simple design principle, and the predicated stability has been validated at the B3LYP/LANL2DZp//HF/LANL2DZ level of theory. Among these, the T h symmetrical (AlN) 12 cluster has been computed to be the most stable cage on the basis of the calculated disproportionation energy and binding energy per AlN unit.

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Section: Introductionmentioning

confidence: 99%

Geometric and Energetic Aspects of Aluminum Nitride Cages

Zhang

et al. 2002

J. Phys. Chem. A

146

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“…Several authors have examined vapor-phase reactions to synthesize AlN. Kimura and co-workers 5,6 reacted aluminum chloride (AlCl 3 ) with ammonia (NH 3 ) in nitrogen to produce submicrometer-sized powders. Similar methods recently were used by Greil et al 7 and Ohhashi et al 8 Adjoattor and Griffin 9 reported an aerosol synthesis route for the production of AlN powders from triethylaluminum and NH 3 .…”

Section: Introductionmentioning

confidence: 99%

Combustion Synthesis of Aluminum Nitride Particles and Whiskers

Bradshaw

Spicer

1999

Journal of the American Ceramic Society

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Aluminum nitride (AlN) was produced via the combustion synthesis of loosely packed aluminum powder (pore fraction of ∼0.8) in a graphite reactor that was lined with permeable carbon felt. Almost-complete conversion was achieved with a forced flow of nitrogen for beds 50-150 mm deep (mass of 200-650 g). The product was in the form of a loosely aggregated bed, with regions of distinct morphology, and had a predominantly whisker morphology. Some control over the microstructure was possible by changing the processing parameters. The addition of 5% of ammonia to the nitrogen resulted in a uniform production of whiskers, whereas a 50% solid-phase dilution with AlN favored the production of particles.

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“…High thermal conductivity, large energy gap, good thermal stability, and chemical inertness of aluminum nitride make it an advanced ceramic material and a suitable dielectric for semiconductor devices. − Organoaluminium compounds have been used as precursors for aluminum nitride; − however, the product formed has a high degree of carbon contamination due to pyrolysis of the organic substituents and is not suitable for commercial use. The CVD of aluminum chloride and ammonia is well studied and yields high purity AlN. − ,− Despite the fact that this process has been the subject of numerous experimental studies, the chemical nature of the intermediates in AlN growth is still unknown. It has been shown that, together with formation of AlN films, some particles are formed in the gas phase .…”

Section: Introductionmentioning

confidence: 99%

The Chemical Vapor Deposition of Aluminum Nitride: Unusual Cluster Formation in the Gas Phase

1997

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An ab initio investigation of the chemical vapor deposition of AlN from the AlCl3NH3 adduct is presented. Geometries, harmonic vibrational frequencies and relative energies for the AlCl3NH3 adduct, its dissociation products AlCl n , NH n (n = 1−3), and ring and cluster compounds [(Cl2AlNH2) n (n = 1, 2), (ClAlNH) n (n = 1, 2, 3, 4, 6)] are discussed. The Al−N bond lengths in the investigated compounds are strongly dependent on the coordination numbers of the aluminum and nitrogen centers, decreasing from 2.0 Å for 4-coordinated Al/N centers to 1.79 and 1.68 Å for 3- and 2-coordinated Al/N centers, respectively. Thermodynamic analysis shows that dissociation of Cl x AlNH x (x = 2, 3) compounds with elimination of HCl and simultaneous formation of oligomeric forms is preferable to the process of dissociation into components or simple HCl detachment. Under standard conditions gaseous 4-coordinated Al/N compounds (ClAlNH)6 and (ClAlNH)4 are more stable than 3-coordinated (ClAlNH)2 and (ClAlNH)3 compounds. In 4-membered rings and clusters, the electrostatic repulsion between nearby Al−Al and N−N atoms makes reorganization to 6-membered rings extremely favorable. The suggested mechanism of AlN deposition involving cluster formation in the gas phase is discussed.

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Particulate characteristics and deposition features of fine AIN powder synthesized by vapour-phase reaction

Cited by 34 publications

References 6 publications

Geometric and Energetic Aspects of Aluminum Nitride Cages

Geometric and Energetic Aspects of Aluminum Nitride Cages

Combustion Synthesis of Aluminum Nitride Particles and Whiskers

The Chemical Vapor Deposition of Aluminum Nitride: Unusual Cluster Formation in the Gas Phase

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