Particle Penetration and Radiation Effects

Sigmund, Peter

doi:10.1007/3-540-31718-x

Cited by 269 publications

(302 citation statements)

References 104 publications

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“…The use of Gaussian distributions for the electronic energy loss in IBA has been widely used in the literature not only because its simplicity but also because after some collisions the energyloss distribution does tend to be a normal distribution according to the central limit theorem (for additional conditions see ref [11]). …”

Section: Current Energy-loss Distributionsmentioning

confidence: 99%

An analytical energy-loss line shape for high depth resolution in ion-beam analysis

Grande

Hentz

Pezzi

et al. 2007

Nuclear Instruments and Methods in Physics Research Section B:

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The knowledge of the energy-loss distribution in a single ion-atom collision is a prerequisite for subnanometric resolution in depth-profiling techniques such as Nuclear Reaction Analysis (NRA) and Medium Energy Ion-Scattering (MEIS). The usual Gaussian approximation specified by the stopping power and energy straggling is not valid for near surface regions of solids, where subnanometric or monolayer resolution can be achieved. In this work we propose an analytical formula for the line shape to replace the usual Gaussian distribution widely used in low-resolution ion-beam analysis. Furthermore, we provide a simple physical method to derive the corresponding shape parameters. We also present a comparison with full coupled-channel calculations as well as with experimental data at nearly single collision conditions.

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Section: Current Energy-loss Distributionsmentioning

confidence: 99%

An analytical energy-loss line shape for high depth resolution in ion-beam analysis

Grande

Hentz

Pezzi

et al. 2007

Nuclear Instruments and Methods in Physics Research Section B:

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“…[1][2][3] for reviews). A fraction of the energy deposited into the system is dissipated through relaxation processes involving the thermally activated migration of point defects.…”

Section: Introductionmentioning

confidence: 99%

Novel mechanism for order patterning in alloys driven by irradiation

2017

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Abstract:Kinetic Monte Carlo simulations have been performed to investigate the evolution of ordered domains in model alloys under irradiation. The alloys investigated were equiatomic binary alloys on a simple square lattice with first and second nearest-neighbor interactions, chosen so that a 2×2 ordered structure is the equilibrium phase below a critical order-disorder transition temperature, T c . The ratio of second to first nearest neighbor interactions, R was varied from 0 to 0.45 to explore the effect of the thermodynamic frustrations induced by the proximity of the 2×1 phase boundary, which occurs at R = 0.5 for T = 0. The atomic mixing produced by nuclear collisions was modeled by forcing the ballistic exchange of pairs of atoms at a controlled rate, Γ b . This disordering process competed with thermodynamic re-ordering, resulting in nonequilibrium steady states. Two trivial steady states were found, a disordered state at high

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“…4 Quantitative interpretation of MEIS spectra demands an accurate description of ion energy loss distributions as a function of depth of the backscattering event in the sample. [5][6][7][8][9][10][11] Owing to its simplicity and to its analytical expression, Gaussian ion energy loss distribution functions are used aiming at the high depth resolution that can, in principle, be provided by MEIS. [12][13][14][15][16][17] The use of Gaussian distributions is supported by the central limit theorem, according to which the energy loss is normally distributed if the number of energy loss events ͑atomic collisions͒ is large.…”

mentioning

confidence: 99%

“…[12][13][14][15][16][17] The use of Gaussian distributions is supported by the central limit theorem, according to which the energy loss is normally distributed if the number of energy loss events ͑atomic collisions͒ is large. 11,18 This condition, however, is not satisfied in the characterization of near-surface, nanoscale structures, where only a small number of energy loss events comes into play. 4,19 A more accurate, stochastic approach to ion energy loss distributions was recently demonstrated 5 to be necessary in this case, which takes into account also electronic excitations of the target atom as obtained from ab initio calculations.…”

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confidence: 99%

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Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering

Pezzi

Krug

Grande

et al. 2008

Applied Physics Letters

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An analytical approach to ion energy loss distributions capable of simplifying medium energy ion scattering ͑MEIS͒ spectral analysis is presented. This analytical approach preserves the accuracy of recent numerical models that evaluate energy loss effects overlooked by standard calculations based on the Gaussian approximation. Results are compared to first principle calculations and experimental MEIS spectra from 0.2-to 1.5-nm-thick HfO 2 films on Si, supporting the application of this analytical model for proton scattering in the kinetic energy range from 100 to 200 keV. © 2008 American Institute of Physics. ͓DOI: 10.1063/1.2918443͔The depth distribution of chemical elements near the surface of solids is of major relevance in many aspects of science and technology. In principle, it can be quantitatively determined on an absolute scale ͑i.e., without reference to standards͒ by using ion scattering. Subnanometric depth resolution can be achieved in near-surface regions through the combined use of high resolution energy analyzers 1 and incident ions with a kinetic energy corresponding to the maximum stopping power of the sample. 2 This setup corresponds to the technique of medium energy ion scattering ͑MEIS͒, 3 which became a natural solution for material characterization in current microelectronics research. 4 Quantitative interpretation of MEIS spectra demands an accurate description of ion energy loss distributions as a function of depth of the backscattering event in the sample. [5][6][7][8][9][10][11] Owing to its simplicity and to its analytical expression, Gaussian ion energy loss distribution functions are used aiming at the high depth resolution that can, in principle, be provided by MEIS. [12][13][14][15][16][17] The use of Gaussian distributions is supported by the central limit theorem, according to which the energy loss is normally distributed if the number of energy loss events ͑atomic collisions͒ is large. 11,18 This condition, however, is not satisfied in the characterization of near-surface, nanoscale structures, where only a small number of energy loss events comes into play. 4,19 A more accurate, stochastic approach to ion energy loss distributions was recently demonstrated 5 to be necessary in this case, which takes into account also electronic excitations of the target atom as obtained from ab initio calculations. However, the computational budget required for these calculations prevents their widespread application to data analysis.In this letter, we propose a semiempirical, analytical solution of the Bothe-Landau equation 11 that can conveniently replace both the Gaussian approximation and the more complete numerical approach of Ref. 5 in data analysis software. The validity of the present analytical energy loss distribution model is verified by comparison with full ab initio simulations 6 and experimental MEIS spectra determined from HfO 2 films on Si in the thickness range from 0.2 to 1.5 nm.It can be shown that for ions interacting with amorphous or polycrystalline targets, the energy los...

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Particle Penetration and Radiation Effects

Cited by 269 publications

References 104 publications

An analytical energy-loss line shape for high depth resolution in ion-beam analysis

An analytical energy-loss line shape for high depth resolution in ion-beam analysis

Novel mechanism for order patterning in alloys driven by irradiation

Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering

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