Parametric study of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane

Garofano, Vincent; Stafford, L.; Despax, Bernard; Clergeraux, Richard

doi:10.1109/plasma.2016.7534044

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“…[18,25]. During nanocomposite thin film deposition using a DLRI, this can play an important role (i) on the dissociation kinetics of the matrix precursor [26], (ii) on the charging and transport dynamics of nanoparticles in the plasma [27], (iii) on the plasma-substrate interaction during thin film deposition [28], and therefore, (iv) on the physical and chemical properties of the coatings [29]. As a building block towards a better understanding of plasma processes using the DLRI, the objective of this study is to gain insights into the physics driving low-pressure RF plasmas with pulsed gas injection.…”

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confidence: 99%

Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Sadek

Vinchon

Durocher‐Jean

et al. 2022

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Pulsed gas injection in a plasma can affect many fundamentals, including electron heating and losses. The case of an asymmetric RF magnetron plasma with a pulsed argon injection is analyzed by optical emission spectroscopy of argon 2p-to-1s transitions coupled with collisional-radiative modeling. For a fully detailed population model of argon 2p levels accounting for direct and stepwise electron-impact excitation in optically thick conditions, a rapid decrease in the electron temperature, Te, is observed during each gas injection with the sudden pressure rise. The opposite trend, with unrealistic Te values before and after each pulse, is observed for analysis based on simple corona models, thus emphasizing the importance of stepwise excitation processes and radiation trapping. Time-resolved electron temperature variations are directly linked to the operating parameters of the pulsed gas injection, in particular the injection frequency. Based on the complete set of data, it is shown that the instantaneous electron temperature monotonously decreases with increasing pressure, with values consistent with those expected for plasmas in which charged species are produced by electron-impact ionization of ground state argon atoms and lost by diffusion and recombination on plasma reactor walls.

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