Parametric Study and Thickness Evaluation of Photoresist Development for the Formation of Microgap Electrodes Using Surface Nanoprofiler

Humayun, Q.; Hashim, U.

doi:10.4028/www.scientific.net/amr.626.942

Cited by 2 publications

(2 citation statements)

References 12 publications

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“…The AutoCAD software which was successfully implemented and showed an excellent result in our previous research [5,6,[10][11][12][13][14], was used for the designing of various dimensions micro channel mask, having the length and width of 0.950 mm and 0.01 mm respectively. The Figure 1…”

Section: Methodsmentioning

confidence: 99%

“…However the silicon cost and long tools fabrication requirement limited its demands. Therefore most of researches are focusing on alternative substrate namely polydimethylsiloxane (PDMS) for fast prototyping [10][11][12][13]. PDMS itself shows good biocompatibility and moreover its elastic nature makes it a good candidate for Lab-on-chip devices [6][7].…”

Section: Introductionmentioning

confidence: 99%

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Structure Characterization of Low Cost Fabricated Soft Material Built Microchannel

Humayun

Hashim

Ruzaidi

2016

MSF

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To perform the entire laboratory activities on a centimeter limit scale electronic chip, the most important aspect is to fabricate a device which persist sensitive and selective for the delivery of fluids flow and have the ability to execute a fast mixing of distinctive chemicals and bio samples. To resolve this issues the current paper is one of the good struggle, therefore the objective was arranged in according to the scope of research such as; to design and fabricate a polydimethylsiloxane (PDMS) material made, micro channel and its structure characterization for the investigation of internal subterranean area. By using an AutoCAD software the channel was first designed, however for the fabrication process the design was transferred to mask. Starting from SU-8 resist the pattern was transferred, and then by using the polydimethylsiloxane (PDMS) the mold was fabricated by adopting a low cost photolithography technique. Finally by employing Hawk 3 D surface nanoprofiler the structure was characterized. In our forthcoming research the device will be tested for real biological samples using a simple hand-operated inoculation technique.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Structure Characterization of Low Cost Fabricated Soft Material Built Microchannel

Humayun

Hashim

Ruzaidi

2016

MSF

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Fabrication of Micro-Gap Structure by Reactive Ion Etching Technique (RIE) for Future Reproductivity of Nanogap Biosensor

Humayun

Hashim

2015

AMR

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The important role of reactive ion etching (RIE) technique is to etch the semiconductor surface directionally. The purpose of the current research is to fabricate polysilicon micro-gap structures by RIE technique for future biosensing application. Therefore zero-gap microstructure of butterfly topology was designed by using AutoCAD software and finally the designed was transferred to commercial chrome glass photomask. Ploysilicon wafer samples were selected to achieve high conductivity during electrical characterization measurement. The fabrication process starts from samples resist coating and then by employing photolithography through chrome glass photomask the zero-gap pattern of butterfly topology was transferred to resist coated sample wafer followed by resist stripping from exposed area and finally by reactive ion etching (RIE) technique the open area of polysilicon was etched directionally at different etching time to fabricate micro-gap structure on wafer samples. The spacing of fabricated micro-gap structures will be further shrink by thermal oxidation (size reduction technique) until to nanosize gap spacing. The proposed nanospacing gap will definitely show the capability to detect the bio molecule when inserted into the gap spacing.

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Parametric Study and Thickness Evaluation of Photoresist Development for the Formation of Microgap Electrodes Using Surface Nanoprofiler

Cited by 2 publications

References 12 publications

Structure Characterization of Low Cost Fabricated Soft Material Built Microchannel

Structure Characterization of Low Cost Fabricated Soft Material Built Microchannel

Fabrication of Micro-Gap Structure by Reactive Ion Etching Technique (RIE) for Future Reproductivity of Nanogap Biosensor

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