2023
DOI: 10.1016/j.sna.2023.114536
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Parametric Investigation on laser annealing of polyimide on improving the characteristics of NiTi SMA-based bimorph towards the development of microactuators

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Cited by 6 publications
(6 citation statements)
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“…The peaks at 16.6°and 22.4°originate from the PI film and are associated with the average interchain distance and amorphous structure, respectively. 35,36 The sharp diffraction peak at 5.6°can be ascribed to the (110) plane of COF300 and indicates the highly periodic structure of COF300. 33 The inserted image in Figure 3b shows the space-filling model of the crystal structure along the [001] direction, 32 indicating that COF300 exhibits pore sizes of approximately 7.8 Å within its channels.…”
Section: Resultsmentioning
confidence: 99%
“…The peaks at 16.6°and 22.4°originate from the PI film and are associated with the average interchain distance and amorphous structure, respectively. 35,36 The sharp diffraction peak at 5.6°can be ascribed to the (110) plane of COF300 and indicates the highly periodic structure of COF300. 33 The inserted image in Figure 3b shows the space-filling model of the crystal structure along the [001] direction, 32 indicating that COF300 exhibits pore sizes of approximately 7.8 Å within its channels.…”
Section: Resultsmentioning
confidence: 99%
“…The form memory effect in the material is stabilized by further heating and cooling cycles [74]. The application of laser annealing to polyimide improves the properties of the NiTi shape memory alloy (SMA) bimorph, namely in terms of actuation and the adhesion between the substrate and the film [75]. The final phase entails machining, surface treatment, and other finishing operations to get the appropriate form, dimensions, and surface quality for the shape memory alloy component.…”
Section: Powder Metallurgy Processingmentioning
confidence: 99%
“…It is important to note that these three paraments of transmission are dependent on the frequency of operation, the capacitance The magnetic, piezoelectric, electrothermal, and SMA mechanisms offer distinct advantages in addressing actuation voltage challenges in MEMS switches [39]. Magnetic mechanisms utilize efficient magnetic forces, allowing for low-actuation voltages and precise control [40]. Piezoelectric mechanisms leverage materials that generate electrical charges under mechanical stress, providing energy-efficient actuation at lower voltages [41].…”
Section: Transmission Performancementioning
confidence: 99%