1990
DOI: 10.1366/0003702904417454
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Parametric Effects on Plasma Emission Produced during Excimer Laser Ablation of YBa2Cu3O7-x

Abstract: The effects of changes in experimental parameters on the plasma emission spectra produced during excimer laser ablation of YBa2Cu3O7 were investigated. Emission from YO is observed for low-incident laser fluences, but is absent for fluences at or above those used for thin film deposition by laser ablation. Excitation within the plasma appears to be primarily due to electron impact. The effects of incident laser fluence and ambient gas pressure on the plasma emission are distinct enough to allow adjustment of e… Show more

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Cited by 25 publications
(9 citation statements)
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“…The thin-film quality from the PLD depends on the various parameters such as wavelength of the laser, energy, ambient gas pressure, pulsed duration, and the distance of the target to the substrate [19]. The ablation process during the deposition may control and monitor by using laser-induced fluorescence [20], laser ablation molecular isotopic spectroscopy [21], and optical emission spectroscopy [22]. The morphology of the deposited thin films is also affected by the substrate temperature.…”
Section: Laser Beam Evaporation (Pulsed-laser Deposition)mentioning
confidence: 99%
“…The thin-film quality from the PLD depends on the various parameters such as wavelength of the laser, energy, ambient gas pressure, pulsed duration, and the distance of the target to the substrate [19]. The ablation process during the deposition may control and monitor by using laser-induced fluorescence [20], laser ablation molecular isotopic spectroscopy [21], and optical emission spectroscopy [22]. The morphology of the deposited thin films is also affected by the substrate temperature.…”
Section: Laser Beam Evaporation (Pulsed-laser Deposition)mentioning
confidence: 99%
“…Ionized atoms, molecules, and radicals present in a laser plume when chemical reactions in plasma are insignificant (as in the case of deposition of oxide films [16]) will facilitate the mapping of the stoichiometry of SHUAIBOV, CHUCHMAN the starting compound on the substrate, initiating electron exchange. Using Eq.…”
Section: Resultsmentioning
confidence: 99%
“…This may be formed by the evolution of the laser plasma during its movement [11] and as a result of differences in the method and amount of applied energy within the target during its layering by previous laser pulses [12]. Thus, it was demonstrated [10] that different plasma elements move in different directions during laser ablation of Cd 1-x Mn x Te.…”
mentioning
confidence: 99%
“…Thus, it was demonstrated [10] that different plasma elements move in different directions during laser ablation of Cd 1-x Mn x Te. The laser plume of YBa 2 Cu 3 O 7-x was studied by emission spectroscopy with high space-time resolution [11]. The effects of gas pressure in a vacuum chamber and the power of laser radiation on the emission properties of the plasma were studied.…”
mentioning
confidence: 99%