2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) 2018
DOI: 10.1109/nems.2018.8556940
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Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model

Xiaoyi Wang
1
,
Wei Xu
2
,
Beiqi Lijin
3
et al.
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