“…Silicon optical bench (SiOB) technology has become a critical solution for aligning micro optical components on silicon substrates in high precision. It has been widely used in a variety of applications in micro optics packaging, such as optical transmitters [1]/receivers [2]/transceivers [3], filters [4,5], switches [6], attenuators [7] and splitters [8], and even in more complex micro optical systems, such as micromachined tunable lasers [9,10], Mach-Zehnder interferometers [11], and Fourier transform spectrometers [12], as well as miniaturized catheters for endoscopic optical coherence tomography (EOCT) imaging [13,14].…”