Parallel optical interconnection using self-adjustung microlenses on injection-molded ferrules made by LIGA technique

Schulze, Jens; Ehrfeld, W.; Hossfeld, Jens; Klaus, Michael; Kufner, M.; Kufner, Stefan; Mueller, Holger; Picard, Antoni

doi:10.1117/12.360052

Cited by 10 publications

(4 citation statements)

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“…A lot of researchers tried to fabricate microlenses by manifold processes such as modified LIGA process [1], photoresist reflow process [2], micro intrusion process [3], and isotropic etching process [4]. Nevertheless, most of them seem not to be successful because of its complexity in the fabrication process and difficulty in realizing microlenses array.…”

Section: Introductionmentioning

confidence: 99%

<title>Microlens fabrication using glass transition temperature modification by the LIGA process</title>

Lee

2001

SPIE Proceedings

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A microlens is one of the most important components in optical microsystems. In the last decade, a lot of attempts have been done to fabricate a microlens or microlenses array, however, most of them are relatively complicated in the fabrication process and have difficulties in getting good surface roughness and realizing microlenses array.In this paper, we represent a very simple fabrication technology of the microlens or microlenses array which is based upon a deep X-ray exposure and a thermal treatment of a resist, usually PMMA. The molecular weight and T g of PMMA is reduced when it is exposed to the deep X-ray. The microlens is produced through the effect of surface tension and reflow by adding a thermal treatment on the irradiated PMMA. A configuration of the microlens is determined by parameters such as absorbed X-ray dose on PMMA, heating temperature, and heating time in the thermal treatment.Diameters of the produced microlens range from 100 µm to 1500 µm and their changed heights are between 10 µm and 20 µm.

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Section: Introductionmentioning

confidence: 99%

<title>Microlens fabrication using glass transition temperature modification by the LIGA process</title>

Lee

2001

SPIE Proceedings

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“…However, a deckle edge was still created at the end face of the V-groove after injection. Thermoplastic materials such as POM, PEI, PEEK, PET, LCP and PPE were studied [13][14][15]. Using the LIGA technique, Ugroove mold insert parts located the core pins and guiding pins.…”

Section: Introductionmentioning

confidence: 99%

Ferrule fabrication for the MT-type optical fiber connector using the microinjection process

Lee¹,

Lin²

2008

J. Micromech. Microeng.

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This study presents a novel design to fabricate the hole array mold parts for 12 ports of the MT-type ferrule using a LIGA process. This fabrication technique can reduce the positioning error efficiently when making the mold assembly. The present design also makes replacing the mold parts convenient. The hole fabrication consists of a single x-ray exposure and development process, Ni-Co (nickel-cobalt) electroforming, and microinjection molding for a fast-curing epoxy liquid compound. Compared to conventional transfer molding technology, the present method for microinjection reduces the cycle time to about 35 s and saves on raw material. The 12 ports in the MT-type optical fiber ferrule were designed using the JIS C5981 and IEC60874-16 specifications. The diameters of the fiber holes had errors of 1 μm, and their position was smaller than 2 μm; these dimensions conform to the single-mode specifications. The proposed LIGA technique has been proven to be effective in reducing the positioning error in mold assembly construction. For the single-mode MT-type connector in the present study, the mean insertion loss (IL) was lower than that shown in the reported literature while the mean return loss (RL) was higher. The uniformities exhibited in IL and RL are much better than those previously reported.

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“…have attempted to fabricate microlenses by diverse processes, for example, the modified LIGA process [2], photoresist reflow process [3], micro-intrusion process [4], and isotropic etching process [5]. However, most of these attempts were unsuccessful because of the complexity of the fabrication process and the difficulties encountered in the production of microlens arrays.…”

Section: Introductionmentioning

confidence: 99%

A simple method for microlens fabrication by the modified LIGA process

Lee¹,

Lee

2002

J. Micromech. Microeng.

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Microlenses and microlens arrays were fabricated using a novel fabrication technology based on the exposure of a resist (usually PMMA) to deep x-rays and subsequent thermal treatment. The fabrication technology is very simple and produces microlenses and microlens arrays with good surface roughness (less than 1 nm). The molecular weight and glass transition temperature of PMMA is reduced when it is irradiated with deep x-rays. The microlenses were produced through the effects of volume change, surface tension, and reflow during thermal treatment of irradiated PMMA. The geometry of the microlens was determined by parameters such as the x-ray dose applied to the PMMA, the diameter of the microlens, along with the heating temperature, heating time and cooling rate in the thermal treatment. Microlenses were produced with diameters ranging from 30 to 1500 μm. The modified LIGA process was used to construct not only hemispherical microlenses, but also structures that were rectangular-shaped, star-shaped, etc.

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Parallel optical interconnection using self-adjustung microlenses on injection-molded ferrules made by LIGA technique

Cited by 10 publications

References 0 publications

<title>Microlens fabrication using glass transition temperature modification by the LIGA process</title>

<title>Microlens fabrication using glass transition temperature modification by the LIGA process</title>

Ferrule fabrication for the MT-type optical fiber connector using the microinjection process

A simple method for microlens fabrication by the modified LIGA process

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