Palladium Nanotubes for Optical Hydrogen Sensing: The Fabrication and Characterisation of Arrays of Nanostructures

Abstract

Figure 1. Cross-sectional schematic of the nanotube fabrication process. The completed nanostructures are shown (F) in their template, with the intermediate stages of the process given by (A)-(E). The process begins with sputtering a multi-layer film consisting of Ta2O5, Au and Al on a glass substrate (A), followed by anodisation to produce an array of nanopores (B). A NaOH chemical etch removes the alumina remaining at the base of the pore (C), allowing a polymer to be electro-deposited (D). A further chemical etch widens the pore around the polymer (E), into which the palladium can be electro-deposited (F).