p-i-n High-Speed Photodiodes for X-RAY and Infrared Imagers Fabricated by &lt;em&gt;In-Situ&lt;/em&gt;-Doped APCVD Germanium Homoepitaxy

Hunt, Charles E.; Carpenter, A.; Voss, Lars F.; Scott, Robert W. J.; Shao, Qinghui; Looker, Quinn; Anne, Garafalo,; Mistyuk, S; Durand, C E; Ankit, Kumar; Jean-Paul, Stroud,; Benthem, Klaus van

doi:10.2172/1809171

2021

DOI: 10.2172/1809171

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p-i-n High-Speed Photodiodes for X-RAY and Infrared Imagers Fabricated by <em>In-Situ</em>-Doped APCVD Germanium Homoepitaxy

Charles E. Hunt

A. Carpenter

Lars F. Voss

et al.

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p-i-n High-Speed Photodiodes for X-RAY and Infrared Imagers Fabricated by <em>In-Situ</em>-Doped APCVD Germanium Homoepitaxy

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