P‐71: Spectrum Relaxation Applied to Film‐Thickness Measurement

Abstract

When we used spectrometer with array sensor to calculate thickness or control refractive index, spectrum resolution was the important factor if we measured the reflectance or transmittance as our first step. This situation would be emphasized while the testing sample was the super thick film (>20 μm) which caused the large dense reflectance or transmittance spectrum. In this paper, we developed a method to improve the measurable range of film thickness by use of the different incident angle spectrum. It means the spectrum obtained from thick film would become sparser even we used the same hardware. Some concrete examples would be described here and their results would be shown in this paper.