P‐19: IGZO Thin‐Film Transistors on Corrugated Substrate for High‐Resolution Display

Abstract

In this study, high-performance InGaZnO (IGZO) thinfilm transistors (TFTs) were fabricated on a corrugated substrate. This substrate structure increases an effective width and generates higher drain current compared to the conventional planar TFTs in the same footprint. We verified this concept with simulation study and experimental results.