2011
DOI: 10.1889/1.3621163
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P‐124: Methods of Measuring Thin Film Thickness on Polymer Substrate

Abstract: In this paper two methods of measuring the thickness of a thin film layer on polymer substrate are presented. The first one is based on a polarizing microscope and analyzing the interference spectrum of white light reflected by the specimen. The second is a microscope with a high numerical aperture lens. The interference fringes caused by the birefringence of the polymer substrate can be eliminated, and by a numerical procedure the film index and thickness can be extracted from the measured reflection spectrum… Show more

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“…Sarfus is a setup where an optical microscope in crosspolarization mode is used in conjunction with specific substrates, so called surfs. The surfs consist of a silicon substrate with a top coating that does not polarize light on reflection and therefore leads to a signal enhancement of the film attached to that layer (Chiang and Yang, 2011). In combination with the use of a calibration standard, layer thicknesses down to 0.3 nm can be determined.…”
Section: Sarfus Techniquementioning
confidence: 99%
“…Sarfus is a setup where an optical microscope in crosspolarization mode is used in conjunction with specific substrates, so called surfs. The surfs consist of a silicon substrate with a top coating that does not polarize light on reflection and therefore leads to a signal enhancement of the film attached to that layer (Chiang and Yang, 2011). In combination with the use of a calibration standard, layer thicknesses down to 0.3 nm can be determined.…”
Section: Sarfus Techniquementioning
confidence: 99%