Oxygen tracer diffusion in IrO2 barrier films

Abstract

The O18 tracer diffusion method was used to investigate oxygen diffusion in reactively dc-sputtered IrO2 films. The profile measurements were done by secondary ion mass spectrometry. For the investigation of the oxygen diffusivity in the samples a temperature range from 600 to 765 °C was chosen. The oxygen tracer diffusion in IrO2 films was found to be described by an Arrhenius law with D0=(2.8±2.5)10−6 m2 s−1 and an activation energy of Ea=(2.73±0.07) eV. It was also shown that the extrinsic oxygen diffusion is strongly influenced by the film preparation conditions, which is especially important for the application of IrO2 films as an oxygen barrier in future memory device applications.

Substrate temperature dependent morphology and resistivity of pulsed laser deposited iridium oxide thin films

“…It crystallizes in the tetragonal rutile structure and has been used for many applications due to its attractive electrical, optical, and electrochemical properties [1][2][3]. These applications include such uses as excellent diffusion barrier and suitable electrode material in ferroelectric's devices, optical switching layers in electrochromic displays, sensing material in PH sensors and durable electrodes for chlorine and oxygen evolution [4,5].…”

Preparation and properties of IrO2 thin films grown by pulsed laser deposition technique

“…It crystallizes in the tetragonal rutile structure and has been used for many applications due to its attractive electrical, optical, and electrochemical properties [1][2][3] . At present, IrO 2 thin films have attracted much attention for optical switching layers in electrochromic devices, pH sensors and durable electrode materials for chlorine or oxygen evolution [4,5] .…”

Effect of substrate temperature on structure and electrical resistivity of laser-ablated IrO2 thin films

“…Iridium oxide (IrO 2 ), as a well-known conductive oxide material, has attractive electrical, optical, and electrochemical properties [1,2]. IrO 2 thin films have also attracted much attention as for ferroelectric devices, diffusion barriers, optical switching layers in electrochromic devices, pH sensors and durable electrode materials for chlorine or oxygen evolution [3,4], etc.…”