“…2 Fabrication process of the two-layered SU-8 mold: a silicon substrate, b Al thin film deposition using radiofrequency magnetron sputtering, c spin coating and patterning of a 10-lm thick layer of SU-8 for clearance, d development of SU-8, e etching Al thin film for alignment, f spin coating and patterning of a 500-lm thick SU-8 layer, g development of SU-8, h pouring PDMS onto the SU-8 mold, and i punching holes for the inlet and the outlet in PDMS valve and the side walls of the microchannel, and enables the micro-VFP applicable to various working fluids. In addition, a specific surface treatment (Tan et al 2010) can be useful to maintain the hydrophilicity of PDMS surface, which will enable us to use water as a working fluid. The motion of the gas-liquid interface in the reservoirs is observed using a CCD camera (WAT-231S2, Watec Co., Ltd., Japan) and is analyzed by in-house software, which tracks the horizontal gas-liquid interface in real time.…”