Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

Abstract

We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zrx,Ti1−x)O3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O2 plasma treatment, giving rise to the improved performances of the PZT films.

Preparation of Nanoporous Titania Films by Surface Sol−Gel Process Accompanied by Low-Temperature Oxygen Plasma Treatment

“…16,17 Low-temperature oxygen plasma etching is employed as a milder method for removal of organic components from bulk hybrids 18 and surface layers. [19][20][21][22][23] We have shown that the surface sol-gel process is an excellent chemical method for the fabrication of polymer/metal oxide nanocomposite films. 24,25 The organic moieties in such composite films may be readily removed by the oxygen plasma treatment.…”

Effect of Low‐Energy Accelerated Ion Bombardment on the Properties of Metal‐Organic Decomposition Derived SrBi2(Ta,Nb)2O9 Thin Films Processed at Low Temperature

“…It has been reported that extra oxygen ions introduced by the plasma treatment can modify the chemical bonding of the lead atoms, transforming the metallic lead into the PZT phase. 10 In this study, the above scenario is more pronounced than the case of crystallized films, because the as-deposited SBTN may have more metallic bismuth states along with metallic bismuth by argon ion bombardment. Thereby, oxygen treatment can passivate the oxygen defects at the interface between the SBTN and platinum or at grain boundaries in the film.…”

Oxygen and hydrogen plasma effects on the MgB2 superconductivity

“…Magnesium diboride powder, purchased from Aldrich Co. (99.998%), was pressed into a pellet, and oxygen and hydrogen plasma treatments were carried out with a microwave power of 120 W at a pressure of 50 Pa for 1 and 2 h [16,17]. X-ray diffraction (XRD) was performed before and after the plasma treatments by using a MAC Science diffractometer with CueK a radiation (l ¼ 0.154056 nm).…”