Integrated Photonics and Nanophotonics Research and Applications / Slow and Fast Light 2007
DOI: 10.1364/ipnra.2007.iwd2
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Oxygen-ion implantation of SOI microring resonators for high-speed all-optical switching

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“…It is expected that optical integrated chips will replace traditional chips and improve operational efficiency. [1][2][3][4][5][6] As integrated optical devices, SOI waveguides provide many advantages over traditional optical materials from production to applications. Firstly, the fabrication process of SOI devices is compatible with that of standard silicon complementary metal oxide semiconductors (CMOSs), [1,2] which has low costs and large scale.…”
Section: Introductionmentioning
confidence: 99%
“…It is expected that optical integrated chips will replace traditional chips and improve operational efficiency. [1][2][3][4][5][6] As integrated optical devices, SOI waveguides provide many advantages over traditional optical materials from production to applications. Firstly, the fabrication process of SOI devices is compatible with that of standard silicon complementary metal oxide semiconductors (CMOSs), [1,2] which has low costs and large scale.…”
Section: Introductionmentioning
confidence: 99%