“…According to the EPR experiment, there are five sets of signal peaks of oxygen vacancies due to the cation vacancies near the oxygen vacancies affecting the resonance peaks of the oxygen vacancies. 25,54 Considering the charge conservation and the chemical environment in KDP crystals, oxygen vacancies (V O 2+ ) can compound with two potassium vacancies (V K − ) to form V O 2+ + 2V K − , or with two hydrogen vacancies (V H − ) to form V O 2+ + 2V H − , or simultaneously with a potassium vacancy and a hydrogen vacancy to form V O 2+ + V K − + V H − cluster defects. In order to build the models of oxygen vacancy cluster defects that can be stable in KDP crystals, the position of hydrogen vacancies and potassium vacancies is determined.…”