Previous optical absorption studies suggest the presence of significant background concentrations of oxygen in GaP (1). According to Miyauchi et al. (2), residual oxygen could be comparable to the total oxygen concentration 1 in O-doped crystals. In other experiments (4), the oxygen concentration could not be correlated with the Ga203 addition to the growth solution, and changes in oxygen concentration were reported to occur during low-temperature annealing. More recently, electrically inactive oxygen, in the form of ~-Ga203 precipitates, have been observed in O-doped SG (solution grown) and LPE (liquid phase epitaxy) crystals (5). The possibility of such large variations in the oxygen concentration and concomitant variation in the number of Zn-O (red) radiative centers (6) have important consequences on the reproducibility of luminescent properties. In this work, we have studied the importance of the above factors in determining the oxygen concentration in GaP LPE layers. We have also examined several aspects of dynamic oxygen incorporation which clarify earlier results on O-doping (7-9) and have determined the maximum oxygen concentration which can be incorporated via LPE growth at ~1025~
ExperimentalBoth Zn-and Zn,O-doped layers were grown on Tedoped (ND--NA~8 • 1017 ) SG or LEC (liquid encapsulation Czochralski) substrates using a fused quartz sealed-tube LPE system which has been described elsewhere (9). Except where indicated, layers were grown in evacuated ampoules which were cooled from 1025 ~ to 600~ at a rate of 10~For several cases, encapsulated mesa diodes were fabricated (8) and the electroluminescent quantum efficiency n of representative diodes was measured at 300~ in a calibrated integrating sphere. The electroluminescent time-decay T D was also measured at 300~ using pulsed current excitation and an appropriate detection system (10). Near-junction oxygen concentrations were computed (9) from high resolution doping profiles (11) of the Zn-and Zn, O-doped LPE layers. Table I summarizes some of the experimental results.
Results and Discussion
Residual OxygenWe have previously shown (8) that at a relatively high Zn concentration of ~1.3 • 10 ls atoms/cm -3 [0.15 mole per cent (m/o) in the LPE solution], ~ increases monotonically with Ga203 addition, demonstrating that substantial and controlled additions of oxygen can be incorporated by LPE, contrasting with the results recently reported for SG crystals (1, 2, 4).The most efficient GaP red-emitting diodes have been fabricated, using additions of 0.03 m/o Zn and 0.35 m/o Ga203 to the LPE solution (8) (entry A in Table I). The addition of Ga203 results in compensation of Zn acceptors equivalent to an increase in donor concentration of 2.7 • 1017 atoms/cm 3, which has been interpreted to be entirely due to the deep O donor (9). To substantiate this interpretation, an O-doped LPE layer was grown using the same Ga~O3 addition. The Key words: gallium phosphide, oxygen incorporation, luminescence, liquid phase epitaxy.1 Hereafter, oxygen concentration is us...