1995
DOI: 10.1116/1.579869
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Oxidation of gold by ultraviolet light and ozone at 25 °C

Abstract: Depth profile of trapped charges in oxide layer of 6HSiC metal-oxide-semiconductor structures Gold surfaces have been found to be hydrophilic only after exhaustive preparation and with the ultimate care in sample preparation and treatment. The use of a combination of ultraviolet ͑UV͒ light and ozone has been described as a viable method of producing a clean, hydrophilic, gold surface. We have found that gold surfaces, which have been either stored in the laboratory after vacuum deposition or purchased as high … Show more

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Cited by 163 publications
(90 citation statements)
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References 28 publications
(31 reference statements)
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“…In this regard, we believe that gold is perhaps the material that is least prone to form a surface oxide. Nevertheless, even gold forms an oxide – Au 2 O 3 – when cleaned in a UV-ozone tool [26]. While this particular oxide sublimes at a temperature somewhat below 200 °C, an extremely stable oxide of unknown structure has been observed to form at 500 °C and an oxygen pressure of 6×10 −7 torr [27].…”
Section: Discussionmentioning
confidence: 99%
“…In this regard, we believe that gold is perhaps the material that is least prone to form a surface oxide. Nevertheless, even gold forms an oxide – Au 2 O 3 – when cleaned in a UV-ozone tool [26]. While this particular oxide sublimes at a temperature somewhat below 200 °C, an extremely stable oxide of unknown structure has been observed to form at 500 °C and an oxygen pressure of 6×10 −7 torr [27].…”
Section: Discussionmentioning
confidence: 99%
“…19,20 In this study we did not inject any hydrocarbons in our mildly baked ultrahigh vacuum (UHV) chamber. In particular, we aimed to show the hydrocarbons adsorption dynamics on the Au surface and its gradual transformation into graphite during the course of EUV irradiation.…”
Section: Introductionmentioning
confidence: 99%
“…112 Largely attributed to hydrocarbon contamination, "clean" cellulose sources contain 5-7% C1 carbon, making absolute comparison of cellulose carbon contents extremely difficult, particularly between different research labs and equipment.…”
Section: Chemical Compositionmentioning
confidence: 99%