Oxidation mechanisms in high pressure dc-sputtered a-Si films

Koropecki, R. R.; Arce, R.; Bernárdez, L.S. De; Buitrago‐Sierra, Robison

doi:10.1016/0022-3093(85)90395-3

Cited by 13 publications

(3 citation statements)

References 10 publications

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“…Thin film formation by rf-sputtering and other relevant techniques may lead to amorphous films with composition and properties depending on preparation conditions. For example, early studies on silicon dioxide, SiO 2 , have shown that this is indeed the case for thin films prepared by evaporation, dc-sputtering, as well as rf-magnetron sputtering . The influence of preparation conditions has been observed also for films formed by pulsed laser deposition (PLD), including differences in composition between thin films and the parent target glass in lead−germanates, and variations in ionic conductivity in lithium−silicate−vanadate thin films prepared by either PLD or rf-sputtering .…”

Section: Introductionmentioning

confidence: 95%

Thin Film Amorphous Electrolytes: Structure and Composition by Experimental and Simulated Infrared Spectra

Kamitsos¹,

Dussauze²,

Varsamis³

et al. 2007

J. Phys. Chem. C

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Ionic conducting glasses in thin film forms are promising candidates for applications in microelectronics devices such as microbatteries and microsupercapacitors. In recent years, it was shown that physicochemical properties of thin films may differ substantially from those of the target bulk materials. Thus, it remains a challenge in science and thin film technology to control the properties of thin films in terms of chemical composition and conditions of manufacturing. This work presents a structural investigation of lithium−borate thin film electrolytes prepared by rf sputtering of Li−diborate targets. Chemically stable thin films ca. 1 μm thick were deposited on Si and gold-covered Si substrates under argon and their infrared spectra were measured in a broad spectral range (30−5000 cm-1). The spectra of thin films were modeled on the basis of rigorous expressions for reflectance and transmittance of the film/substrate bilayer system. The experimental results for thin films were compared with those simulated by using the optical response functions of bulk glasses xLi2O−(1−x)B2O3 (x = 0.33, 0.30, 0.275, 0.25), which were prepared by the conventional melt quenching technique. The comparison of experimental and simulated spectra showed that rf sputtering of Li−diborate targets (x = 0.33) leads to Li−borate thin films with lithium oxide content lower than that of the target material. Best agreement between experimental and simulated thin film spectra was obtained for x = 0.275, after proper annealing of thin films to remove differences in thermal history between thin film and bulk glass states.

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Section: Introductionmentioning

confidence: 95%

Thin Film Amorphous Electrolytes: Structure and Composition by Experimental and Simulated Infrared Spectra

Kamitsos¹,

Dussauze²,

Varsamis³

et al. 2007

J. Phys. Chem. C

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“…However, various deposition techniques may lead to glassy thin films with physicochemical properties presenting differences with respect to those of bulk materials with the same composition. For example, early studies on silicon dioxide, SiO 2 , have shown that this is indeed the case for thin films prepared by evaporation, 12 dc sputtering, 13 as well as by rf-magnetron sputtering.…”

Section: Introductionmentioning

confidence: 99%

Structure and optical properties of amorphous lead-germanate films developed by pulsed-laser deposition

Dussauze

Giannoudakos

Velli

et al. 2007

The Journal of Chemical Physics

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Lead-germanate materials are attractive systems for photonics applications. In this context, amorphous lead-germanate films were grown by pulsed-laser deposition at different substrate temperatures and oxygen pressures using a glassy target of composition 0.4PbO -0.6GeO 2 . Optical and infrared measurements showed that the substrate temperature has a strong influence on the optical quality and stability of the deposited films. An accurate characterization of films was achieved by comparing experimental and simulated transmittance spectra in the infrared, and allowed to probe the structural evolution and variations in composition as a function of oxygen pressure. The results showed that the difference in reactivity of lead and germanium toward oxygen in the laser-produced plasma allows for composition adjustments in the lead-germanate films by varying the oxygen pressure in the deposition chamber.

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“…Thus, when R, 5 7 x l o p 2 a weak absorption band was observed at 900 to 1200cmp'. According to literature [24], this is due to the existence of Si-0-Si groups. If After the long stay in the atmosphere the absorption intensity at 2000 cm-' was the same, whereas the absorption intensity at 2100 cm-I noticeably decreased and strong absorption appeared near 2170 to 2300 cm-(which is in agreement with [29,301) due to oxygen influence.…”

Section: Resultsmentioning

confidence: 99%

Analysis of Hydrogen in Aerosol Particles of a‐Si: H Forming during the Pyrolysis of Silane

Onischuk

Strunin

Ushakova

et al. 1994

Physica Status Solidi (b)

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The hydrogen content in aerosol particles of a-Si : H, forming during pyrolysis of silane, is studied by means of the methods of hydrogen evolution and IR spectroscopy. The conclusion is drawn that the evolution peaks at 650,730, and 750 to 850 K correspond to hydrogen present in the dihydride groups of polysilane chains, the monohydride groups of the clustered phase, and the monohydride groups of the dilute phase, respectively. In the IR spectra the monohydride groups of the clustered phase cause absorption near 2000 cm-' and the monohydride groups of the dilute phase near 2100 cm-'. Under low silane conversion the main fraction of hydrogen is contained in (SiHJ", under conversion more than 50% in monohydride groups. MeTonaMH 3@@y3AA BOnOpOna II MK CneKTpOCKOIIHH H3yYaJIOCb COAepXaHAC BOnOpOAa B a3pO-30JTbHblX YaCTHUaX a-Si : H, 06pasym~xcs npA IIHpOJIH3e CAJIaHa. EbIn CAeJlaH BbIBOA, YTO Ha6JIWAae-MbIe nHKM 3@@Y3HH npH 650, 730 H 750 a0 850K 06yCJIOBneHbI BOnOpOnOM, HaXOHBUIHMCB B AHrHAPIIAHbIX rpyIIIIaX IIOjIHCllnaHOBbIX UtXOqeK, MOHOrAAPHfiHbIX rpyIIIIaX K-7XTepHpOBaHHOg @3bI H MOHOrHAPHAHbIX rpyIIIIaX "pa3peXeHHOfi" @a361 COOTBCTCTBeHHO. B MK-cneKTpax MOHOTH-UPHAHbIM rpynnaM KJIaCTepHpOBaHHO~ @3bI COOTBeTCTByeT IIOrJIOWeHlre B6JTH3A 2000 CM -' , a MOHOTA&-JHnHbIM rpynnaM " p a 3 p e x e~~o 8 " @ a m B6JTH3H2 100 CM-n p~ ManbIx cTenemx pasnoxe-H H I~ cHnaHa ocHoBHas nona Bonopona coAepxHTca B (SiH2),,, a n p~ cTeneHIi p a 3 n o x e~~s 6onee 50% B MOHOTHAPHnHblX rpyIInaX. ') 630090 Novosibirsk, Russia.44 A. A. ONISCHUK, V. P. STRUNIN, M. A. USHAKOVA, and V. N. PANFILOV in the conditions of [ l l ] and with the reaction time t = 0.50 s the surface initiation occursonly at reactor temperatures T 2 825 K, i.e. when 1 -0 2 0.12. As follows from estimations, the aerosol particles in the gas phase can also contribute to silane decomposition. Therefore, to understand the mechanism of silane decomposition, it is necessary to study the formation of aerosol particles and their role in pyrolysis.This paper continues the studies [l 1,161 of the mechanism of silane thermal decomposition in the conditions of aerosol formation. In [ l l , 161 the main attention has been paid to the influence of aerosol particles deposited on the reactor walls on the process of pyrolysis as well as to the parallel dependence of the concentration of the gas-phase products of pyrolysis and certain parameters of the aerosol particles (concentration, size, morphology) on the degree of silane conversion. In this work, using the same experimental conditions as in [ll, 161, we have studied the hydrogen content in aerosol particles depending on the degree of silane conversion. Comparing our results with those obtained in [ l l , 161 we will provide additional insight into the understanding of the role of aerosol particles in the thermal decomposition of silane.

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Oxidation mechanisms in high pressure dc-sputtered a-Si films

Cited by 13 publications

References 10 publications

Thin Film Amorphous Electrolytes: Structure and Composition by Experimental and Simulated Infrared Spectra

Thin Film Amorphous Electrolytes: Structure and Composition by Experimental and Simulated Infrared Spectra

Structure and optical properties of amorphous lead-germanate films developed by pulsed-laser deposition

Analysis of Hydrogen in Aerosol Particles of a‐Si: H Forming during the Pyrolysis of Silane

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