Oxidation kinetics of sputtered Cr–N hard coatings

Mayrhofer, P.H.; Willmann, Herbert; Mitterer, Christian

doi:10.1016/s0257-8972(01)01471-2

Cited by 132 publications

(70 citation statements)

References 19 publications

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“…CrN films have been used for cutting tools, molding dyes and machine parts. But the oxidation resistance of CrN is limited up to 800 C [13]. For hard protective coatings, thermal stability is a main property as they are exposed to high temperatures during the cutting process.…”

Section: Introductionmentioning

confidence: 99%

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Tlili

Nouveau

Walock

et al. 2012

Vacuum

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. Cr/CrN/CrAlN, CrN/CrAlN and Cr/CrN thin layers were deposited by PVD (Physical Vapor Deposition). The multilayers were obtained from the combined deposition of different layers Cr, CrN and CrAlN thick films on on AISI4140 steel and silicon substrates at 200 C, and evaluated with respect to fundamental properties such as structure and thermal properties. Cr, CrN and CrAlN single layers were also prepared for comparison purposes. The structural and morphological properties of PVD layers were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) coupled with EDS þ WDS microanalyses, stresses were determined by the Newton's rings methods using the Stoney's equation and surface hardening and hardness profiles were evaluated by micro hardness measurements. The XRD data and HRTEM showed that both the Cr/CrN, CrN/CrAlN and Cr/CrN/CrAlN multilayer coatings exhibited B1NaCl structure with a prominent reflection along (200) plane, and CrAlN sub-layer microstructures composed of nanocrystallites uniformly embedded in an amorphous matrix. The innovation of this work was to use the thickness of three different coating types to determine the thermal properties. Furthermore, an empirical equation was developed for the thermal properties variations with temperature of AISI4140 steel coated with different multilayer coatings. The thermal conductivity of CrAlN single layered was lower than the multilayer and the bulk material AISI4140. Moreover, the influences of structure and composition of the multilayer coatings on the thermal properties are discussed. The thermal conductivity of nanoscale thin film is remarkably lower than that of bulk materials because of its various size effects.

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Section: Introductionmentioning

confidence: 99%

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Tlili

Nouveau

Walock

et al. 2012

Vacuum

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“…CrN 코팅막은 열적 안정성, 고경도, 내마모성 및 내식성과 같은 우수한 기계적 및 기능적 특성 때문 에 보호 코팅 및 확산 베리어 분야에서 주목 받아 왔다 [1][2][3][4] . 최근에는 위와 같은 기계적, 물리적 특성 뿐만 아니라 뛰어난 전기전도도 및 내식성으로 인 하여 PEMFC(Polymer Electrolyte Membrane Fuel Cell) 용 금속계 분리판 코팅재료로도 주목받고 있 다 5) .…”

Section: 서 론unclassified

A Comparative Study of CrN Coatings Deposited by DC and Inductively Coupled Plasma Magnetron Sputtering

Seo¹,

Chun²

2012

Journal of the Korean institute of surface engineering

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Nanocrystalline CrN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 500 W, on coating microstructure, preferred orientation mechanical properties were systematically investigated with HR-XRD, SEM, AFM and nanoindentation. The results show that ICP power has an significant influence on coating microstructure and mechanical properties of CrN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Grain size of CrN coatings were decreased from 11.7 nm to 6.6 nm with increase of ICP power. The maximum nanohardness of 23.0 GPa was obtained for the coatings deposited at ICP power of 500 W. Preferred orientation in CrN coatings also vary with ICP power, exerting an effective influence on film nanohardness.

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“…Chromium nitride coatings exhibit better corrosionand oxidation-resistance in comparison to other nitride coatings [17][18][19]. Chromium nitride (CrN x ) has attracted much attention in different tribological, material forming, and casting applications in terms of its high temperature stability, chemical inertness, high hardness, superior toughness, good wear resistance, and lower friction coefficient than TiN [19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

et al. 2018

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In the current work, the microstructure, hydrogen permeability, and properties of chromium nitride (CrN x ) thin films deposited on the Inconel 718 superalloy using direct current reactive sputtering are investigated. The influence of the substrate bias voltage on the crystal structure, mechanical, and tribological properties before and after hydrogen exposure was studied. It was found that increasing the substrate bias voltage leads to densification of the coating. X-ray diffraction (XRD) results reveal a change from mixed fcc-CrN + hcp-Cr 2 N to the approximately stoichiometric hcp-Cr 2 N phase with increasing substrate bias confirmed by wavelength-dispersive X-ray spectroscopy (WDS). The texture coefficients of (113), (110), and (111) planes vary significantly with increasing substrate bias voltage. The hydrogen permeability was measured by gas-phase hydrogenation. The CrN coating deposited at 60 V with mixed c-CrN and (113) textured hcp-Cr 2 N phases exhibits the lowest hydrogen absorption at 873 K. It is suggested that the crystal orientation is only one parameter influencing the permeation resistance of the CrN x coating together with the film structure, the presence of mixing phases, and the packing density of the structure. After hydrogenation, the hardness increased for all coatings, which could be related to the formation of a Cr 2 O 3 oxide film on the surface, as well as the defect formation after hydrogen loading. Tribological tests reveal that hydrogenation leads to a decrease of the friction coefficient by up to 40%. The lowest value of 0.25 ± 0.02 was reached for the CrN x coating deposited at 60 V after hydrogenation.

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Oxidation kinetics of sputtered Cr–N hard coatings

Cited by 132 publications

References 19 publications

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

Effect of layer thickness on thermal properties of multilayer thin films produced by PVD

A Comparative Study of CrN Coatings Deposited by DC and Inductively Coupled Plasma Magnetron Sputtering

Hydrogen Permeation, and Mechanical and Tribological Behavior, of CrNx Coatings Deposited at Various Bias Voltages on IN718 by Direct Current Reactive Sputtering

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