Oxidation behaviour of W-N-M (M = Ni, Ti) sputtered films

Louro, C.; Cavaleiro, A.

doi:10.1016/0257-8972(95)08318-9

Cited by 17 publications

(1 citation statement)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…6 shows that the Ni content is much higher than that in other zones, which means that the oxidation stage is well advanced. This type of punctual oxidation seems different from that observed for W±N±Ni coatings [12]. Indeed, in this latter case, the preferential oxidation occurred in the places where the structural transformation amorphous 3 crystalline began to take place.…”

Section: Morphological Characterisationcontrasting

confidence: 56%

The influence of small additions of Ni, Ti and C on the oxidation behaviour of sputtered tungsten coatings

Louro

Cavaleiro

1999

Journal of Materials Processing Technology

View full text Add to dashboard Cite

The oxidation rate of sputtered tungsten-based coatings, oxidised in air at temperatures of 6008C±8008C can be in¯uenced signi®cantly by the addition of small amounts of nickel, titanium and carbon. The presence of carbon does not change the type of oxide phases formed during the oxidation of sputtered W coatings: there are two oxide layers, the inner being a compact sub-oxide of WO x type and the outer being a typical porous WO 3 phases. The addition of Ni and Ti, however gives rise, in addition to WO x and WO 3 , of other type of oxides, such as NiWO 4 and TiO 2 , respectively. The oxidation process is very complex, with different¯uxes of species to be considered: the oxygen ion¯ux from the exterior to the interior, and Ni and Fe diffusing towards the exterior. At the annealing temperature of 8008C, in the cases of W±C±Ni ®lms, a FeWO 4 layer is detected beneath the mixed oxide. The greatest oxidation resistance is obtained for W±C±Ti, followed by W±C±Ni and ®nally W±C. # .pt (A. Cavaleiro) 0924-0136/99/$ ± see front matter # 1999 Elsevier Science S.A. All rights reserved. PII: S 0 9 2 4 -0 1 3 6 ( 9 9 ) 0 0 2 2 2 -8

show abstract

Section: Morphological Characterisationcontrasting

confidence: 56%