Overview on fabrication of three-dimensional structures in multi-layer ceramic substrate

Khoong, L.E.; Tan, Y.M.; Lam, Yee Cheong

doi:10.1016/j.jeurceramsoc.2010.03.011

Cited by 76 publications

(50 citation statements)

References 37 publications

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“…The layout of the sealing glass layer consists of two rectangular shaped rings individually placed at the edge and inside the carrier, which defines two parallel inlet channels at the sides of the carrier and one outlet channel at the center, between both glass plates. This rather simple design was chosen over more advanced approaches such as three dimensional patterning of low-temperature co-fired ceramic (LTCC) [8][9][10][11], as it allows a wider selection of substrate materials in order to achieve close thermal expansion match with a wide range of parts, ranging from micromachined silicon to stabilized zirconia. The cross-section area of the inlet fluidic channel was proposed to be 2 × 0.2 mm 2 in order to minimize pressure drop of the inlet n-butane gas.…”

Section: Design Of a µ-Sofc Testing Systemmentioning

confidence: 99%

A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

Jiang

Muralt

Heeb

et al. 2012

Sensors and Actuators B: Chemical

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Micro-scale solid oxide fuel cells (µ-SOFCs) constitute a promising power generation technology for portable devices such as aerospace exploration, medical devices and consumer electronics. Fuel cell systems include several functional units providing gas reforming, electrochemical power generation, and post-combustion of unused fuel. All such units require operation at controlled temperature with appropriate gases. Although various µ-SOFC components have been demonstrated, the evaluation of the thermal balance is cumbersome, as there is no micro platform providing thermal insulation, controlled heating, temperature control, and gas exchange. Our testing platform is designed for this purpose. It consists of two sealed glass substrates with integrated platinum thermistors for heating and temperature control, and channels to supply and evacuate gases. Its fabrication is compatible with silicon chip bonding. The heating elements are thick-film platinum thermistors allowing to heat up to 700°C. Efficient thermal decoupling along the carrier allows convenient lowtemperature electrical and fluidic connections. A fluidic MEMS module -a prototype gas reformer -was bonded onto the carrier to demonstrate tight gas connections at elevated temperature. Laboratoire de Production Microtechnique (LPM) AbstractMicro-scale solid oxide fuel cells (µ-SOFCs) constitute a promising power generation technology for portable devices such as aerospace exploration, medical devices and consumer electronics. Fuel cell systems include several functional units providing gas reforming, electrochemical power generation, and post-combustion of unused fuel. All such units require operation at controlled temperature with appropriate gases. Although various µ-SOFC components have been demonstrated, the evaluation of the thermal balance is cumbersome, as there is no micro platform providing thermal insulation, controlled heating, temperature control, and gas exchange. Our testing platform is designed for this purpose. It consists of two sealed glass substrates with integrated platinum thermistors for heating and temperature control, and channels to supply and evacuate gases. Its fabrication is compatible with silicon chip bonding. The heating elements are thick-film platinum thermistors allowing to heat up to 700°C. Efficient thermal decoupling along the carrier allows convenient low-temperature electrical and fluidic connections. A fluidic MEMS module -a prototype gas reformer -was bonded onto the carrier to demonstrate tight gas connections at elevated temperature.

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Section: Design Of a µ-Sofc Testing Systemmentioning

confidence: 99%

A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

Jiang

Muralt

Heeb

et al. 2012

Sensors and Actuators B: Chemical

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“…This elongation can be avoided if a final structure has only open cavities. In this latter case, such 3D mechanical structures can be protected by rubber-like insert material [85,89], which sustains the structure during lamination and is taken out after it.…”

Section: Thermo-compressive Lamination With Sacrificial Materialsmentioning

confidence: 99%

Overview on low temperature co-fired ceramic sensors

Jurków

Maeder

Dąbrowski

et al. 2015

Sensors and Actuators A: Physical

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Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.

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“…Then, the printed tapes were placed in a furnace for 20 min at 100 °C, after which layers 1, 2, and 3 were stacked and placed on a film made from carbon particles and organic solvent to form the cavity. (16,17) Finally, layer 4 was stacked onto layer 3.…”

Section: Fabricationmentioning

confidence: 99%

Zirconia Ceramics Applied in a Pressure-Sensitive Device Fabricated Using HTCC Technology

2014

Sensors and Materials

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A wireless passive high-temperature cofired ceramic (HTCC) pressure sensor fabricated from partially stabilized zirconia (PSZ) ceramic is proposed. This sensor can be used in high-temperature environments (in excess of 1000 °C in some cases) owing to its high mechanical strength at high thermal stress, and pressure data can be transmitted through mutual inductance coupling. Experimental systems are designed to obtain the necessary frequency-pressure and frequency-temperature characteristics. The experimental results between room temperature and 800 °C (and then at 800 °C for 30 min) indicate that the sensor has improved stability at 800 °C and the sensor also shows a high sensitivity at room temperature.

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Overview on fabrication of three-dimensional structures in multi-layer ceramic substrate

Cited by 76 publications

References 37 publications

A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

A micro heater platform with fluid channels for testing micro-solid oxide fuel cell components

Overview on low temperature co-fired ceramic sensors

Zirconia Ceramics Applied in a Pressure-Sensitive Device Fabricated Using HTCC Technology

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