The annealing of magnetron-sputtered carbon films doped with up to 8.5 at% W, Ti, V, and Zr prior the erosion experiments led to formation of carbide cyrstallites of several nm. Ti, V, and Zr always reduces the total erosion yield by a factor of up to 20 compared to a pure C film. A temperature dependency of the metal erosion was observed. The methane production yield was studied by mass spectrometry. The CD 4 production yield decreases less than the total yield or even increases. This implies that the distribution of the chemically eroded species is changed by the dopants. It can be speculated that the re-deposition of carbon is reduced by doping.