Handbook of Semiconductor Manufacturing Technology 2017
DOI: 10.1201/9781420017663-2
|View full text |Cite
|
Sign up to set email alerts
|

Overview of Interconnect—Copper and Low-k Integration

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2018
2018
2022
2022

Publication Types

Select...
1
1

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 86 publications
0
2
0
Order By: Relevance
“…The state indifference is seen as damaging to the heritage value by experts. Dixit (2017), a noted historian in Nepal, remarks that “it is an unseemly fight that has delayed the restoration, and weakened the cultural aura that Kasthamandap sheds as the centre of Nepal Mandala, and a symbolism for the nation-state”. Dixit’s view may be discounted as being parochial; however, Western scholars have also viewed Kasthamandap as a landmark opportunity to resist any form of heritage subjugation.…”
Section: Local Resistance and Heritage Subjectivitiesmentioning
confidence: 99%
“…The state indifference is seen as damaging to the heritage value by experts. Dixit (2017), a noted historian in Nepal, remarks that “it is an unseemly fight that has delayed the restoration, and weakened the cultural aura that Kasthamandap sheds as the centre of Nepal Mandala, and a symbolism for the nation-state”. Dixit’s view may be discounted as being parochial; however, Western scholars have also viewed Kasthamandap as a landmark opportunity to resist any form of heritage subjugation.…”
Section: Local Resistance and Heritage Subjectivitiesmentioning
confidence: 99%
“…Additionally, higher electromigration reliability than Al by at least 10 times is another advantage for Cu as a conductor because Cu has a lower diffusivity than Al. Based on these reasons, semiconductor industries are fully transitioning toward using Cu instead of Al in future IC applications [12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%