We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50Q coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capable of detecting RF power with a sensitivity of l.lV/W without any waveguide coupling structure.
MotivationBolometric microwave and mm-wave power sensors integrated with GaAs-MMIC have not been reported so far. Such sensors may be used for the evaluation of reflection coefficients, power levels in microwave circuits or for the