Overlay Accuracy Measurement Technique Using the Latent Image on a Chemically Amplified Resist

Abstract

A Monte Carlo (MC) strategy that combines the effective differential cross section for elastic scattering of electrons and the continuous slowing-down approximation for the description of inelastic energy loss is proposed. Depth-dose distributions, backscattering and transmission coefficients are simulated using this MC strategy for electrons with primary energies 10 keV E 1 MeV passing through the Al target. The results of these simulations are in good agreement both with the results obtained from the detailed MC simulation and with experiment. The proposed MC strategy significantly decreases the total number of collisions experienced by electrons in matter and hence significantly decreases the computational cost in the MC simulation.