2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2020
DOI: 10.1109/asmc49169.2020.9185365
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Output Improvement in High Volume Memory Fabs by Reducing Recipe Qualifications

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“…Being even a few years old will not enable them cannot carry out the leading-edge research. Fabs and all the required measuring equipment can run to 100s of million dollars [18]. Also, collaborations must be made with multiple researchers spanning many companies as sub vendors.…”
Section: Resultsmentioning
confidence: 99%
“…Being even a few years old will not enable them cannot carry out the leading-edge research. Fabs and all the required measuring equipment can run to 100s of million dollars [18]. Also, collaborations must be made with multiple researchers spanning many companies as sub vendors.…”
Section: Resultsmentioning
confidence: 99%
“…Being even a few years old will not enable them cannot carry out the leading-edge research. Fabs and all the required measuring equipment can run to 100s of million dollars [18]. Also, collaborations must be made with multiple researchers spanning many companies as sub vendors.…”
Section: Discussionmentioning
confidence: 99%