The advancement of microelectronic systems, such as implantable medical devices, integrated circuits, microchips and microelectromechanical systems (MEMS) including microrobots, [1] nanogenerators [2] and nanotransducers, [3] requires the development of high performance miniaturized energy storage devices. [4] Micro-supercapacitors (MSCs) with interdigital electrode (IDE) structures exhibit the potential for integration into microelectronic power supply systems as a replacement for microbatteries, which are currently the most widely used power source, as MSCs have many advantages including faster charging, a longer life cycle, and more stable cycling. [5] In order to meet the application requirements of microelectronic systems, researchers not only explored high-performance capacitive materials, but also develop miniaturized fabrication technology. [6] Many technologies, such as ink-jet printing, [7] laser etching, [8] plasma etching [9] and photolithography, [10][11][12] have been developed and used to prepare the IDE structure for MSCs, but are limited by the resolution of manufacturing techniques ranging from tens of micrometers to the sub-millimeter level. Unfortunately, the miniaturization progress of MSCs is still far behind the development of microelectronic systems. There is an urgent demand for the further miniaturization of devices from the micro scale to the nanoscale for practical applications. In 2015, Lobo et al. first used focused ion beam (FIB) technology to fabricate MSC devices with an interelectrode spacing of 1 µm, which demonstrated a large capacitance, low time response and a low equivalent series resistance. [13] Until recently, only one work using FIB to prepare the rudiments of NSCs with nanoscale slits has been reported. The prepared NSCs showed apparent enhanced capacitive performances, [14] which triggered the development of NSCs. However, the research remains lacking without further study of fine structure and unique charge storage mechanisms.Transition metal dichalcogenides (TMDs), an emerging kind of 2D material, have shown extraordinary potential in the area of pseudocapacitance. Compared to the well-studied MoS 2 [15] and MoSe 2 , [16] recently their analogue MoTe 2 has demonstrated an even higher specific capacitance. [17] Electrochemical insertion of electrolyte ions into the interlayer of 2D plains is expedited in MoTe 2 due to its large interlayer spacing. Advances in microelectronic system technology have necessitated the development and miniaturization of energy storage devices. Supercapacitors are an important complement to batteries in microelectronic systems; and further reduction of the size of micro-supercapacitors is challenging. Here, a novel strategy is demonstrated to break through the resolution limit of micro-supercapacitors by preparing nano-supercapacitors (NSCs) with interdigital nanosized electrodes using focused ion beam technology. The minimization of the size of the NSCs leads to a large increase in capacitance, with a high areal capacitance of 9.52 mF cm...