Oscillating composition of Fe–W alloy thin films grown by magnetron co-sputtering

Plantin, Pascale; Thomann, Anne-Lise; Brault, Pascal; Renault, P.-O.; Laaroussi, S.; Goudeau, P.; Boubeker, B.; Sauvage, Thierry

doi:10.1016/j.surfcoat.2007.01.014

Cited by 15 publications

(7 citation statements)

References 23 publications

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“…While the relationship between the period and the substrate rotation speed has also been confirmed by previous studies [14,15], the position dependence of the period λ has not been investigated previously. For the present case the model predicts that the period is almost independent of the position along r: up to r = 0.6 it deviates by b 1% from the original value at the center of the wafer.…”

Section: Comparison Of Model and Experimentsmentioning

confidence: 62%

“…the individual layer thicknesses are comparable to the lattice constants of Cu and Ta. Plantin et al [14] have studied Fe-W alloys and found no layer formation for b10 nm layer thickness. However, this value corresponds to the resolution limit of the technique they used for the characterization of the layers in their work (the resolution of Rutherford Backscattering (RBS) is 5-10 nm [36]).…”

Section: Breakdown Of Layer Formation At Small Periodsmentioning

confidence: 99%

“…[7][8][9][10][11][12][13]); (b) substrate rotation during co-deposition from several confocal sources [14,15]. To the authors knowledge, no systematic study of the latter method has been reported in literature so far, despite the fact that co-sputtering from confocal sources is a widespread technique for the production of thin film alloys, where fast substrate rotation is used to homogenize film thickness [16] and composition, i.e.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Müller

Sologubenko

Gerstl

et al. 2016

Surface and Coatings Technology

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Section: Comparison Of Model and Experimentsmentioning

confidence: 62%

Section: Breakdown Of Layer Formation At Small Periodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Müller

Sologubenko

Gerstl

et al. 2016

Surface and Coatings Technology

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“…The formation of such multilayered structures was explained in detail in our recent work . Briefly, the formation of the nanolayers is related to the sample rotation applied during the cosputter deposition of the gold–copper alloy nanowires. , Such rotation results in the formation of periodic Au-poor/Au-rich nanolayers. When dealloying such a nanolayered structure, the Au-poor layers are quickly dealloyed, while the Au-rich layers resist the dissolution process for the treatment durations not exceeding 300 s. When reaching 600 s (Figure c), the nanolayered structure disappears, and a granular/porous morphology is observed.…”

Section: Resultsmentioning

confidence: 99%

Planar Arrays of Nanoporous Gold Nanowires: When Electrochemical Dealloying Meets Nanopatterning

Chauvin

Delacôte

Molina‐Luna

et al. 2016

ACS Appl. Mater. Interfaces

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Nanoporous materials are of great interest for various technological applications including sensors based on surface-enhanced Raman scattering, catalysis, and biotechnology. Currently, tremendous efforts are dedicated to the development of porous one-dimensional materials to improve the properties of such class of materials. The main drawback of the synthesis approaches reported so far includes (i) the short length of the porous nanowires, which cannot reach the macroscopic scale, and (ii) the poor organization of the nanostructures obtained by the end of the synthesis process. In this work, we report for the first time on a two-step approach allowing creating highly ordered porous gold nanowire arrays with a length up to a few centimeters. This two-step approach consists of the growth of gold/copper alloy nanowires by magnetron cosputtering on a nanograted silicon substrate, serving as a physical template, followed by a selective dissolution of copper by an electrochemical anodic process in diluted sulfuric acid. We demonstrate that the pore size of the nanowires can be tailored between 6 and 21 nm by tuning the dealloying voltage between 0.2 and 0.4 V and the dealloying time within the range of 150-600 s. We further show that the initial gold content (11 to 26 atom %) and the diameter of the gold/copper alloy nanowires (135 to 250 nm) are two important parameters that must carefully be selected to precisely control the porosity of the material.

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“…A detailed description of the experimental device is given by P. Plantin et al [14]. Briefly, three magnetron targets are focused onto rotating Si (100) substrates.…”

Section: Methodsmentioning

confidence: 99%

Complex structure/composition relationship in thin films of AlCoCrCuFeNi high entropy alloy

Dolique

Thomann

Brault

et al. 2009

Materials Chemistry and Physics

Self Cite

131

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We have studied the deposition of AlCoCrCuFeNi high entropy alloy (HEA) thin films on Si (100) substrates by DC magnetron sputtering process. Three mosaic targets have been used for easily tailoring the film composition. Energy dispersive X-ray spectrometry analysis has shown that chemical composition can be modified around the nominal value by tuning the ratio of the powers applied to the magnetron targets. The deposition rate is directly related to the power sum. Moreover, various surface morphologies have been evidenced by scanning electron microscopy and correlated to the crystalline phases present in the films. Morphology and crystalline structure have been found to depend on the chemical composition. Wetting contact angle has been measured with water droplets, showing that the hydrophobic properties of the thin films depend on their characteristics.

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Oscillating composition of Fe–W alloy thin films grown by magnetron co-sputtering

Cited by 15 publications

References 23 publications

Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Nanoscale Cu/Ta multilayer deposition by co-sputtering on a rotating substrate. Empirical model and experiment

Planar Arrays of Nanoporous Gold Nanowires: When Electrochemical Dealloying Meets Nanopatterning

Complex structure/composition relationship in thin films of AlCoCrCuFeNi high entropy alloy

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