OS1-2-2 Calibration Method Using Multiple Reference Planes for Real-time Shape and Deformation Measurement

Abstract

Calibration is important to perform accurate shape measurement using a grating projection. It is required to calculate spatial coordinates from the phase value of a projected grating in short time for real-time shape measurement. We propose a calibration method using multiple reference planes. This method excludes a lens distortion and intensity errors of a projected grating in measurement results theoretically. Tabulation of relationship between phase values and spatial coordinates for each pixel makes short-time measurement possible. This calibration method is applied to the real-time shape and deformation measurement.