Thin film structures of [Cu 3 (BTC) 2 (H 2 O) 3 ] n (HKUST-1), which is one of Metal-organic frameworks (MOFs), prepared via step-by-step liquid phase epitaxy (LPE) method, on a TiO 2 (110) surface were investigated by polarizationdependent total reflection fluorescence X-ray absorption fine structure (PTRF-XAFS), X-ray diffraction (XRD), and scanning electron microscopy (SEM). For the ultra thin film, PTRF-XAFS enlightened that HKUST-1 eventually formed even at 1 cycle LPE. For further growth, XRD and SEM verified well-oriented h111i HKUST-1 thin films on the surface. These results proposed that the adsorption structure of linkers on the surface plays an important role to control the orientation of MOF films.