We propose a kinetic model for the annealing in p-i-n-type hydrogenated-amorphous-silicon ͑a-Si: H͒-based solar cells using a combination of the fill factor and "fast" and "slow" metastable defect states in their absorbers. Reported annealing data are simulated on p-i-n-type a-Si: H-based solar cells using the proposed model in order to confirm its validity. The recovery kinetic dependence on the thermal annealing temperature, biased voltage, and phase of the absorber controlled by the hydrogen dilution ratio during deposition are reviewed. Furthermore, we suggest a recovery mechanism for the solar cells based on long range hydrogen diffusion. © 2006 American Institute of Physics. ͓DOI: 10.1063/1.2213507͔Despite high interest of late in thin-film Si solar modules, a major obstacle to their commercialization remains. Specifically, light-induced degradation, which originates from the photocreation of dangling bonds ͑DBs͒ accomplished by the nonradiative recombination of photogenerated electron-hole pairs ͑Staebler-Wronski effect͒, 1 limits the efficiency of hydrogenated-amorphous-silicon ͑a-Si: H͒-based solar cells. In spite of extensive research on the StaeblerWronski effect during the past 30 years, there is no consensus on a microscopic mechanism that explains all experimental phenomena. Similarly, the recovery mechanism for a-Si: H-based solar cells through thermal annealing 2,3 or intense illumination at high temperature with a strong reverse bias 4 has yet to be identified: the recovery kinetics against thermal annealing is often interpreted by the stretched exponential kinetics 5,6 wherein defect generation and annealing for a-Si: H-based materials are controlled by only one type of metastable defect as a result of a dispersive process. 7 However, several recent studies have provided experimental evidence that a-Si: H-based materials possess "fast" and "slow" metastable defects, which is clearly contradictory to the stretched exponential kinetic model. [8][9][10] Thus, the stretched exponential kinetic model is no longer considered appropriate and the total defect density cannot uniquely determine the state for the a-Si: H-based solar cells. In the present work, a model of recovery kinetics for p-i-n-type a-Si: H-based solar cells employing the two-component metastable defect states is suggested.The fill factor ͑FF͒ was selected as a measure of the state for the a-Si: H-based solar cells due to the following reasons. ͑i͒ FF is sensitive to the quality of the intrinsic ͑i͒ absorber. ͑ii͒ Analytic equations relating FF to the collection length, i.e., FFϰ E, where and are the average mobility and lifetime of photogenerated carriers and E is the internal electric field in the i absorber, and to the defect density ͑or electron spin density͒ have been developed. 11 ͑iii͒ FF is the most degraded parameter against light soaking in a-Si: H-based solar cells 6,12 and is less sensitive to the measurement temperature and illumination intensity compared to the opencircuit voltage and short-circuit current. 2 FF for p-i-...