Organometallic Peroxy-compounds and Their Reactions

Abstract

Trench surface charging at the plasma etching of dielectrics and semiconductors is a negative phenomenon because it leads to non-uniform etching of the trench bottom, undesirable etching of its wall, etch stop and breakdown of lower level device elements. To investigate the charging of a SiO 2 trench surface by argon radio frequency discharge plasma we applied the 3D Monte Carlo method for modelling the electron and ion trajectories inside a trench and used the 2D analytical method to calculate electric fields and potentials produced by the deposited charges. The secondary electron-electron emission was taken into account as a really important mechanism of electrical charge redistribution on the trench surface. The ion energy spectra were calculated for the trench aspect ratios (depth d/width w) of 1-20 and trench widths of 11, 22 and 45 nm for 180 eV ion flux. The transformation of an initial ion energy spectrum from a delta function at 180 eV into bell-shaped curves with peak shifts of 10-60 eV and broadening of 5-30 eV is obtained.

Synthesis of Ethers via Reaction of Carbanions and Monoperoxyacetals

“… 12 Lithiated peroxides, sometimes described as “oxenoid” in character, transfer LiO to a variety of carbanions, 13 and similar reactivity patterns have been observed with other metalloperoxides. 14 Bisacyl peroxides even transfer acyloxy groups to enolates and enamines. 15 However, transfer of alkoxide is more challenging.…”

“…Bistrimethylsilyl peroxide efficiently transfers OSiMe 3 to a variety of organometallic reagents; curiously, t BuOOSiMe 3 transfers neither OSiMe 3 nor t BuO . Lithiated peroxides, sometimes described as “oxenoid” in character, transfer LiO to a variety of carbanions, and similar reactivity patterns have been observed with other metalloperoxides . Bisacyl peroxides even transfer acyloxy groups to enolates and enamines .…”