Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces

Liu, C. Y.; Datta, Anindya; Wang, Yuh‐Lin

doi:10.1063/1.1335543

Cited by 134 publications

(101 citation statements)

References 12 publications

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“…Si-nitride, fabricated by e-beam lithography) 298 -examples are shown in Figure 11.a-c. In parallel, also the direct creation of FIB induced initiation sites 305 was successfully explored for Ti surfaces 306 -as presented in Figure 11.d-h. As for aluminium, 307 or silicon, 308 FIB initiation sites can guide anodization, allowing for unusual patterning of TiO 2 nanotubes in square, triangular, flower, and other tube arrangements 286,309 .…”

Section: Maximizing Orderingmentioning

confidence: 99%

One-Dimensional Titanium Dioxide Nanomaterials: Nanotubes

2014

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Section: Maximizing Orderingmentioning

confidence: 99%

One-Dimensional Titanium Dioxide Nanomaterials: Nanotubes

2014

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“…can produce hexagonal or square lattices of concaves on the surface of aluminium membranes which subsequently guide the anodisation process [135][136] (figure 13(c)). The automation of FIB systems, in so-called "auto-FIB" mode, and the ever increasing resolution of the Ga-ion columns, well below a threshold of 50 nm, makes this approach highly promising for the preparation of very large and dense areas of concaves.…”

Section: Focused Ion Beam (Fib)mentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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“…Lack of surface smoothness prevents self-organization of the pores and hence virtually all experiments that employ AAO start from a pretreatment step in which the aluminum substrate is first polished to attain a desired degree of surface smoothness. This smooth surface is then either subjected to (a)multiple anodization-and-etching steps [15] or (b) a pre-patterning stage followed by a single step anodization [16][17][18][19] to achieve long range pore order. The former method results in a quasi-monodomain structure whereas the latter produces a perfectly ordered nanopore lattice.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of hexagonally ordered nanopores in anodic alumina: An alternative pretreatment

et al. 2011

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Abstract. Anodic aluminum oxide (AAO) or anodic alumina template containing hexagonally ordered nanopores has been widely used over the last decade for the development of numerous functional nanostructures such as nanoscale sensors, computing networks and memories. The long range pore order requires the starting aluminum surface to be extremely smooth. Electropolishing is the most commonly used method for surface planarization prior to anodization. While prevalent, this method has several limitations in terms of throughput, polishing area and requirement of special experimental setups, which introduce additional speed bottlenecks in the intrinsically slow AAO-based nanofabrication process. In this work we report a new generation of the so-called -chemical polishing‖ approach which circumvents these stumbling blocks in the pretreatment phase and offers a viable, simpler, safer and faster alternative to electropolishing. These benefits are obtained without sacrificing the quality of the final AAO template. In this work we have (a) identified the optimum parameter regime for chemical polishing and (b) determined process conditions for which a novel parallel nanoridge configuration self-assembles and extends over a distance of several microns. Such patterns can be used as a mask for fabricating nanocrossbars, which are the main structural components in myriad nanoscale memories and crosspoint architectures.

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Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces

Cited by 134 publications

References 12 publications

One-Dimensional Titanium Dioxide Nanomaterials: Nanotubes

One-Dimensional Titanium Dioxide Nanomaterials: Nanotubes

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Fabrication of hexagonally ordered nanopores in anodic alumina: An alternative pretreatment

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