Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array
Zhendong Luo,
Huwang Hou,
Ting Meng
et al.
Abstract:The optomechanical uncooled infrared (IR) detector, based on the bimaterial microcantilever thermal deformation, has proved to have great potential due to the ability to measure IR using visible-spectral-range components. However, like most types of detectors, they encounter the common limitation of a low fill factor, leading to an inefficient utilization of light energy. The metalens, with a compact footprint, high design flexibility, and MEMS (microelectromechanical systems) compatibility, is expected to be … Show more
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