Optogalvanic spectroscopy with microplasma sources—current status and development towards a lab on a chip

Persson, Anders; Berglund, Martin; Khaji, Zahra; Sturesson, Peter; Söderberg, Johan; Thornell, Greger

doi:10.1088/0960-1317/26/10/104003

Cited by 5 publications

(6 citation statements)

References 22 publications

(52 reference statements)

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“…At each step, the voltage between the electrodes and the probe, as well as the external pressure and flow rate were recorded. These parameters were chosen with respect to the first intended application of the device, which was to monitor the plasma inside a detector for optogalvanic spectroscopy 5 . In this application, pressures below 6 Torr and flows rates below 15 sccm are of particular interest 12 .…”

Section: Figure 2 Schematic View Of the Measurement Scheme Showing Amentioning

confidence: 99%

“…The first intended application of the device is in a system for optogalvanic spectroscopy 4,5,19 where the pressure and flow rate generally is restricted to levels below 6 Torr and 15 sccm. Figure 6 shows the sensor performance in this domain, where the starting pressure was varied in nine steps between 1.1 Torr and 4.1 Torr.…”

Section: Voltage Difference Between the First Upstream And Downstrementioning

confidence: 99%

“…From being mostly central to many fabrication processes, plasma has begun to find more diverse uses through the integration of different kinds of microplasma sources in miniaturized systems 1 . Examples of this include gas sensors based on both emission 2,3 and optogalvanic spectroscopy 4,5 , microreactors where the plasma is used to initiate chemical reactions 6 , sterilization by UV and/or reactive ions 7,8 , and sources of photons or ions in, e.g., lasers 9 and mass spectrometers 10 . Together, such use of plasma offers substantially extended functionality in microsystems in general, and microfluidics in particular.…”

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confidence: 99%

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Combined pressure and flow sensor integrated in a split-ring resonator microplasma source

Snögren

Berglund

Persson

2016

Applied Physics Letters

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PostprintThis is the accepted version of a paper published in Applied Physics Letters. This paper has been peerreviewed but does not include the final publisher proof-corrections or journal pagination.Citation for the original published paper (version of record):Snögren, P., Berglund, M., Combined pressure and flow sensor integrated in a split-ring resonator microplasma source. Abstract. Monitoring and control of the principal properties of a discharge or plasma is vital in many applications, and sensors for measuring them must be integrated close to the plasma source in order to deliver reliable results. This is particularly important, and challenging, in miniaturized systems, where different compatibility issues sets the closest level of integration. In this paper, a sensor for simultaneous measurement of the pressure and flow through a stripline split-ring resonator microplasma source is presented. The sensor utilize fully integrated electrodes Applied Physics Letters

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Section: Figure 2 Schematic View Of the Measurement Scheme Showing Amentioning

confidence: 99%

Section: Voltage Difference Between the First Upstream And Downstrementioning

confidence: 99%

mentioning

confidence: 99%

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Combined pressure and flow sensor integrated in a split-ring resonator microplasma source

Snögren

Berglund

Persson

2016

Applied Physics Letters

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“…Our research group has previously demonstrated the possibility to perform stable isotope measurements [14] with a partly miniaturized system [15] based on a stripline splitring resonator (SSRR) microplasma source [16], which had some major advantages with respect to electromagnetic compatibility and interference [16], noise equivalent absorption sensitivity and minimum detectable absorption [14], and integrability with other functionality [17]. It was used in a measurement scheme called optogalvanic spectroscopy where isotopes could be detected by illuminating the discharge with laser light in resonance with one of the isotope-specific rovibrational states of the investigated molecule (in this case 12/13 CO 2 ) [18]. The isotope abundances could then be quantified by studying the change in plasma impedance that the excited molecules caused.…”

Section: Introductionmentioning

confidence: 99%

Microplasma emission spectroscopy of stable isotope ratios in carbon dioxide

Persson

2022

Plasma Sources Sci. Technol.

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This study investigates the prospects of using emissions from the discharge of a stripline split-ring resonator microplasma source to measure the 13C/12C isotope ratio in CO2. The plasma source was used in a measurement scheme called microplasma emission spectroscopy, in which the visible emission spectrum of the CO2 discharge was investigated using a CCD spectrometer. The study revealed that the major isotope dependencies of the spectrum originated from the Ångström system (B1Σ+→A1Π) of CO molecules that had been converted from CO2 in the discharge. Although at least four of the bands of the Ångström system showed clear isotopic dependences, the (0-3) band at 561 nm was concluded to show the most prospects for spectrometric applications because of a combination of wide isotopic shift and low background. A theoretical model of this band was constructed and used in a partial least squares fitting algorithm, to quantify the abundance of 12C and 13C in the sample. This signal processing method was shown to be robust and linear over the whole dynamic range of 13C/12C ratios (1-100%) but required a ten-fold improvement in precision and accuracy at naturally occurring 13C levels (1.07-1.12%) to be useful in most scientific applications. However, several promising ways of achieving such an improvement have been presented, and the results demonstrate the potential of creating a simple, cost-effective, and highly miniaturized system for isotope ratio measurements, which could offer great advantages to scientists in many different fields, from environmental science to planetary exploration.

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“…Integrating isolation valves in HTCC, is a step towards realizing a lab on a chip using this technology. Presented in [16], is an example of an ongoing effort to make an HTCC lab-on-a-chip for space applications. Among other components, this chip integrates the microplasma source and the microcombustor presented in [14] and [15], respectively, and is an application foreseen for the valve presented here.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing and characterization of a ceramic single-use microvalve

Khaji

Klintberg

Thornell

2016

J. Micromech. Microeng.

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-Presented here and with foreseen utilization in space applications and other demanding applications, is the manufacturing and characterization of a ceramic single-use microvalve with the potential to be integrated in lab on a chips. A-3 mm diameter membrane was used as the flow barrier, and the opening mechanism was based on cracking the membrane by inducing thermal stresses on it with fast and localized resistive heating.Four manufacturing schemes based on high-temperature co-fired ceramic technology were studied.Three designs for the integrated heaters and two thicknesses of 40 and 120 µm for the membranes were considered, and the heat distribution over their membranes, the required heating energies, their opening mode, and the flows admitted through were compared. Furthermore, the effect of applying +1 and -1 bar pressure difference on the membrane during cracking was investigated.Thick membranes demonstrated unpromising results for low pressure applications since the heating either resulted in microcracks or cracking of the whole chip. Because of the higher pressure tolerance of the thick membranes, the design with microcracks can be considered for high-pressure applications where flow is facilitated anyway.Thin membranes, on the other hand, showed different opening sizes depending on heater design and, consequently, heat distribution over the membranes, from microcracks to holes with the sizes of 3-100% of the membrane area. For all the designs, applying +1 bar over pressure, contributed to bigger openings, whereas -1 bar pressure difference had this influence just for one of the designs and resulted in smaller openings for the other two. The energy required for breaking these membranes was a few hundred mJ with no significant dependence on design and applied pressure.The maximum sustainable pressure of the valve for the current design and thin membranes was 7 bar.

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Optogalvanic spectroscopy with microplasma sources—current status and development towards a lab on a chip

Cited by 5 publications

References 22 publications

Combined pressure and flow sensor integrated in a split-ring resonator microplasma source

Combined pressure and flow sensor integrated in a split-ring resonator microplasma source

Microplasma emission spectroscopy of stable isotope ratios in carbon dioxide

Manufacturing and characterization of a ceramic single-use microvalve

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