Opto-Acoustic Technique to Investigate Interface of Thin-Film Systems

Yoshida, S.; Didie, David; Didie, Daniel; Adhikari, Sushovit; Park, Ik Keun

doi:10.1007/978-3-319-06986-9_12

Cited by 2 publications

(1 citation statement)

References 12 publications

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“…Figure 3 (1) shows examples [17,18] of fringe patterns and the Fourier spectrum of the intensity profile along a horizontal line around the vertical center. The left fringe pattern (a) is the case where the film was coated without a surface treatment; the middle (b) is where the film was coated after the silicon substrate was treated with the oxygen-plasma bombardment technique; and the right (c) is where the transducer was turned off.…”

Section: Proof Of Principlementioning

confidence: 99%

Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

Yoshida

Didie

et al. 2016

Applied Sciences

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Abstract:The elastic property of the film-substrate interface of thin-film systems is characterized with an opto-acoustic method. The thin-film specimens are oscillated with an acoustic transducer at audible frequencies, and the resultant harmonic response of the film surface is analyzed with optical interferometry. Polystyrene, Ti, Ti-Au and Ti-Pt films coated on the same silicon substrate are tested. For each film material, a pair of specimens is prepared; one is coated on a silicon substrate after the surface is treated with plasma bombardment, and the other is coated on an identical silicon substrate without a treatment. Experiments indicate that both the surface-treated and untreated specimens of all film materials have resonance in the audible frequency range tested. The elastic constant of the interface corresponding to the observed resonance is found to be orders of magnitude lower than that of the film or substrate material. Observations of these resonance-like behaviors and the associated stiffness of the interface are discussed.

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Section: Proof Of Principlementioning

confidence: 99%

Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

Yoshida

Didie

et al. 2016

Applied Sciences

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Common-path conoscopic interferometry for enhanced picosecond ultrasound detection

Liu

Guillet

Audoin

2018

Journal of Applied Physics

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We report on a common-path implementation of conoscopic interferometry in picosecond pump-probe reflectometry for simple and efficient detection of picosecond ultrasounds. The interferometric configuration proposed here is greatly simplified, involving only the insertion of a birefringent crystal in a standard reflectometry setup. Our approach is demonstrated by the optical detection of coherent acoustic phonons propagating through thin metal films under two representative geometries, one a particular case where the crystal slab is part of a sample as substrate of a metal film, and the other a more general case where the crystal slab is independent of the sample as part of the detection system. We first illustrate the former with a 300 nm thin film of polycrystalline titanium, deposited by physical vapor deposition on top of a 1 mm-thick uniaxial (0001) sapphire crystal. A signal-to-noise ratio (SNR) enhancement of more than 15 dB is achieved compared to conventional reflectometry. Next, the general case is demonstrated with a 900 nm-tungsten film sputtered on a silicon wafer substrate. More echoes can be discriminated by using the reported approach compared to standard reflectometry, which confirms the improvement in SNR and suggests broad applications for the reported method.

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Opto-Acoustic Technique to Investigate Interface of Thin-Film Systems

Cited by 2 publications

References 12 publications

Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

Opto-Acoustic Method for the Characterization of Thin-Film Adhesion

Common-path conoscopic interferometry for enhanced picosecond ultrasound detection

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