2009
DOI: 10.1016/j.ijthermalsci.2008.12.008
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Optimum ventilation based on the overall ventilation effectiveness for temperature distribution in ventilated cavities

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Cited by 36 publications
(13 citation statements)
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“…Because the efficiency of heat transfer across the substrate/susceptor interface was sufficiently high by virtue of the vacuum chuck system [13], the susceptor temperature was considered to be almost equal to the temperature of the back surface of substrate (T sub ). This enabled us to estimate T surf adequately from the heat flux from the plasma, the thermal conductivity of the substrate material and T sub by carrying out timedependent simulations on temperature distributions around the plasma region using the PHOENICS software, which is a general-purpose three-dimensional numerical simulator for flow and heat transfer [14][15][16].…”
Section: Methodsmentioning
confidence: 99%
“…Because the efficiency of heat transfer across the substrate/susceptor interface was sufficiently high by virtue of the vacuum chuck system [13], the susceptor temperature was considered to be almost equal to the temperature of the back surface of substrate (T sub ). This enabled us to estimate T surf adequately from the heat flux from the plasma, the thermal conductivity of the substrate material and T sub by carrying out timedependent simulations on temperature distributions around the plasma region using the PHOENICS software, which is a general-purpose three-dimensional numerical simulator for flow and heat transfer [14][15][16].…”
Section: Methodsmentioning
confidence: 99%
“…Moureh and Flick (2005), combined numerical and experimental parametric study of inlet and outlet positions of a ventilated cavity and showed how to improve environmental parameters such as temperature and contaminant concentration inside the cavity. More recently Xaman et al (2009) presented results of a numerical study to find the optimum ventilation configuration for overall ventilation effectiveness for temperature distribution inside a ventilated cavity. However, although these authors claim to have found an optimum design through their parametric studies, none of them considered the use of formal techniques of optimization to achieve their results.…”
Section: Problem Formulation: Fluid Flow In a Cavitymentioning
confidence: 99%
“…Subudhi et al [33] concluded from their study that natural ventilation depends on the position and size of the openings. Xamán et al [34], Macias-Melo et al [35], Serrano-Arellano et al [36] and Xamán et al [37] too established that ventilation, and hence, thermal comfort is dependent on the position of the opening. Moosavi et al [38] did a comprehensive review of earlier studies done for different design considerations in a building to obtain an optimum and effective ventilation and suggested the outlet opening size as the most influential parameter affecting the behaviors of the ventilation pattern along with the indoor thermal condition.…”
Section: Introductionmentioning
confidence: 99%