Abstract:This paper presents the design of a fuzzy-controller-based ultra-high vacuum pressure control system and its performance evaluation for a sputter-ion vacuum pump used in the electron storage ring at the Synchrotron Light Research Institute (Public Organization) in Thailand. The production of synchrotron light requires advanced vacuum technology to maintain stability and prevent interference of electrons in an ultra-high vacuum pressure environment of about 10−9 Torr. The presence of heat and gas rupture from t… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.